請用此 Handle URI 來引用此文件: http://hdl.handle.net/11455/5829
標題: 半導體12吋晶圓廠AC+2B3T System再生週期延長探討
Study on Prolonging Regeneration cycle of AC+2B3T Type Ion-Exchange resin system in 12in Wafer FAB
作者: 李思賢
Li, Su-Hsien
關鍵字: 超純水
Ultra pure water
離子交換樹脂
再生藥劑調整
8D
Ion-exchange resin
Regenerant chemical adjustment
Eight Disciplines
出版社: 環境工程學系所
引用: 1. Nitto Denko/Hydranautics,2008版反滲透與納濾膜產品技術手 冊 2. Nomura Micro Science 編著,2005 sales diary 3. 太陽化成股份有限公司 張和貴 4. 林世煌、古凱明,製程冷却水系統介紹,2007/05 5. 林怡成、姜智興、楊名宏、陳建清,2B3T 再生參數最佳化探討, 2009科學園區廠務技術研討會 6. 唐麗英,實驗設計,2006 7. 許欲凌,SPC基本概念,2006 8. 陳俊吉,UPW System介紹,2006/10 9. 張忠樸,實驗因子選擇法,2002 10.葉斯馨,劉金華,晶圓廠超純水系統再生廢水回收技術研究,半 導體科技,第29 期,2002/7 11.楊光安、張佩琳、金光祖,工研院能資所 UV/O3先進氧化技術, 2008 12.楊炳章,半導體12吋晶圓廠用水與回收再利用探討,國立中興大 學環境工程學系碩士學位論文,2010/06 13.楊炳章、林世煌等,自來水使用量最適化節約專案,2007/10 14.楊婉華,評估8D於醫學檢驗室檢驗品質管理系統中異常管理之運 用,2007/06 15.經濟部工業局/財團法人中衛發展中心,全國團結圈活動網站, 2009/06 16.經濟部工業局/財團法人中衛發展中心,全國團結圈活動網站, 2009/06. 17.賴耿陽 (1998),純水‧超純水製造法,復漢出版社,2 版
摘要: 隨著半導體等高科技產業的發展,在製程上需求高潔淨的水以移除表面污染物是極重要的步驟,在生產技術層面及總體產值產量上逐年增長,發展至今12吋晶圓製造廠,伴隨而來的製程用水量亦隨之上升,逐漸形成水資源短缺的現象 。因此為了達成產業與環保的永續經營,水資源之有效運用是目前極需重視的課題。 本研究以某半導體12吋晶圓廠為研究案例,應用Eight Disciplines of Problem Solving(8D)方法,針對超純水系統AC+2B3T(Active Carbon+2 Bed 3 Tower)處理單元再生週期延長進行研究,結果確認「每公升樹脂再生藥劑量」及「產水終點設定」為主要影響因子。 此研究在確保品質安全範圍下,利用再生藥劑調整,達到AC+2B3T System再生週期延長,使再生藥劑成本降低,節省再生運轉成本,進而達到節能減廢的成效。此研究之結果可做為日後新建工廠或超純水系統擴建設備時的經驗參考。
With development in high-tech industry such as semiconductor, it is an important procedure to remove surface impurities by using highly pure water. In the trend of production skill improving and maximum yields increasing year by year, amount of water usage in 12-inch wafer fabs is also increasing fast. This situation also contributes to water shortage. Therefore, using water effectively is an issue deserved to highly attention in order to attend the purpose of sustainable development of industry and environment protection. This research practically implemented in a 12-inch wafer fab. Eight Disciplines of Problem Solving(8D) was employed in this study which focuses on prolonging regeneration cycle of AC+2B3T (Active Carbon+2 Bed 3 Tower) type Ion-Exchange resin unit in ultra pure water system. Regenerant chemical amount per liter resin and endpoint of water treatment amount are found the three major factors influencing regeneration cycle. Through regenerant chemical adjustment, this study prolongs regeneration cycle of AC+2B3T System under quality control. It reduces the cost of regenerant chemical and saves the cost of operation. Furthermore, the resources could be saved and waste could be less. Results of this study could be a useful reference for new factories or ultra pure water system setting up.
URI: http://hdl.handle.net/11455/5829
其他識別: U0005-2108201217192200
文章連結: http://www.airitilibrary.com/Publication/alDetailedMesh1?DocID=U0005-2108201217192200
顯示於類別:環境工程學系所

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