Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/5895
標題: 薄膜生物反應槽處理半導體廠廢異丙醇之探討
Potential of membrane biological reactor for treating isopropyl alcohol waste from a semiconductor manufacturing plant
作者: 張良智
Chang, Ling-Chih
關鍵字: 異丙醇
Isopropyl alcohol
品管控制手法
薄膜生物反應槽
化學需氧量
混合液懸浮固體物
Quality control story
membrane bio-reactor
chemical oxygen demand
mixed liquor suspended solids
出版社: 環境工程學系所
引用: 參考文獻 1.范姜仁茂; 莊連春; 曾迪華; 廖述良; 游勝傑; 梁德明, 薄膜生物反應器(MBR)於廢水處理之技術評析. 工業污染防治季刊 2009, (第109期 ), 第51-53頁. 2.台灣經濟研究院產經資料庫, 半導體業及其所屬之細項產業定義及所提供之產品項目. 台灣經濟研究院中華民國行業標準分類 2011. 3.台灣趨勢研究股份有限公司, 半導體製造業發展趨勢. 2012, 網址: http://www.twtrend.com/share_cont.php?id=32. 4.柴換欣, 爾必達聲請破產保護台廠將面對三星更強大競爭. Digitimes電子報 2012, 網址: http://www.digitimes.com.tw/tw/rpt/rpt_show.asp?rpttype=P&cnlid=3&v=20120229-128&seq%20-%20ixzz2PILG2Rzq. 5.彭茂榮, 全球記憶體產品市場發展現況與預測. 工研院電子報 2011, (第10012期), 第3頁. 6.克里斯‧安德森, 商業的未來. 中信出版社,北京,中國 2009, 第95頁. 7.陳政威, 半導體廠壓縮乾燥空氣系統運轉最適化探討. 國立中興大學環境工程學系在職專班碩士論文 2012. 8.吳宗翰, 製程微縮. 2007, 網址: http://www.digitimes.com.tw/tw/dt/n/shwnws.asp?CnlID=10&id=0000057627_A4U8FD50RR3AQ9A6UXFSJ. 9.王春盛, 半導體高濃度廢水之高級氧化處理與有機廢液之異丙醇回收. 元智大學化學工程系碩士論文 2002. 10.行政院環境保護署, 毒性化學物質災害防救查詢系統. 2013, http://toxiceric.epa.gov.tw/Chm_/Chm_ResultDetail.aspx?serial=73. 11.高年信譯; Russell, D. L., 廢水處理實務Practical Wastewater Treatment. 滄海出版社,台中市,台灣 2007, 第232-233頁. 12.林敬傑, 薄膜程序處理及回收薄膜生物反應槽(MBR)出流水之研究. 國立中央大學環境工程系碩士論文 2007. 13.簡茂椿譯,狩野紀昭, 課題達成型 QC-STORY. 中衛出版,台灣 1997.
摘要: 目前半導體製程所排放之有機溶劑中,異丙醇(Isopropyl Alcohol, IPA)為最大宗之溶劑,其處理方式大多以收集後清運委外處理為主,而IPA具有生物可分解性,為了達到有機溶劑減量目標,本研究嘗試探討以廠內現有的薄膜生物反應槽(Membrane Bioreactor, MBR)生物處理系統進行處理。MBR是結合傳統活性污泥法與薄膜技術之廢水處理方法,廠區中MBR系統的污水來源為餐廳廢水、地排及化糞池之上層排出水,接著進入生物反應槽,再利用薄膜與生物處理去除水中的有機質,最後輸送至總放流或進入回收水系統。研究採用品管控制手法(Quality Control Story, QC Story)中的各項程序,例如系統數據收集整理,文獻的回顧與參考等,加以驗證後,以出流水的化學需氧量(Chemical Oxygen Demand, COD)和反應槽內的混合液懸浮固體物(Mixed Liquor Suspended Solids, MLSS)作為本研究探討的主要指標。 實驗期間依序每日嘗試添加10 L~100 L之IPA與原生活污水混合,當IPA添加至100 L時,出流水的COD開始有較顯著升高之變化,已超過出流水之標準,然而當IPA每日添加量固定為100 L時,觀察其COD變化,得知若將MLSS經適當排泥並維持於MBR系統中約20,000 mg/L,出流水的COD最低則可維持低於出流水標準。本研究是以實際工廠進行操作評估,證實薄膜生物反應槽處理有機溶劑具可行性,所獲得的參數指標可提供給業界參考。
Among the waste organic solvent drain from semiconductor manufacturing processes, isopropyl alcohol (IPA) accounts for the most significant amount of the waste solvent. The waste solvent is usually treated by collecting them and then sent to a qualitifed contractor for treatment. To achieve an objective of reduction of organic solvent, this study was attempted to explore the potential of using the existing membrane biological reactor (MBR) for the treatment of biodegradable IPA. MBR process combines traditional biological acivated sludge and membrane technologies for treating wastewater. The source of wastewater for theMBR system is from restaurants, floor drains and septic tanks and the treated water is either discharged or recycled. Research was conducted employing the Quality control story (QC Story) procedure, including steps such as data collection, review of literatures, and verification. Chemical Oxygen Demand (COD) and mixed liquor suspended solids (MLSS) were adopted as the main parameters in this study . During the experiment, 10 L to 100 L of IPA were in sequence added into the raw wastewater in collection tank. When 100 L of IPA was added, COD in the effluent exceeded the regulation level. However, if MLSS in the MBR system was reduced to around 20000 mg/L, the COD level in the effluent can be maintained under the regulation level. This study was conducted in the on-site MBR system in an semiconductor factory and demonstrated a possibility of using MBR system for treating IPA. Therefore, operation parameters obtained in this study may be as references for the industrial waste treatment.
URI: http://hdl.handle.net/11455/5895
其他識別: U0005-1308201314162800
文章連結: http://www.airitilibrary.com/Publication/alDetailedMesh1?DocID=U0005-1308201314162800
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