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標題: Activation energy of water vapor and oxygen transmission through TiNxOy/PET gas barrier films
作者: Lin, M.C.
Chen, M.J.
Chang, L.S.
關鍵字: Titanium oxynitride film
Reactive magnetron sputtering
Gas permeation
Activation energy
期刊/報告no:: Applied Surface Science, Volume 256, Issue 23, Page(s) 7242-7245.
摘要: Titanium oxynitride (TiNxOy) films were deposited on polyethylene terephthalate (PET) substrates by means of a reactive radio frequency (RF) magnetron sputtering system in which the power density was the varied parameter. Experimental results show that the deposited TiNxOy films with a thickness of about 55 nm have similar contents of TiN, TiNxOy and TiO2 bonds, although they are deposited at different power densities. The TiNxOy films deposited at a lower power density have fewer internal defects and grain boundaries and possess higher activation energy and a lower rate of water vapor and oxygen transmission through TiNxOy/PET films. (C) 2010 Elsevier B. V. All rights reserved.
ISSN: 0169-4332
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