請用此 Handle URI 來引用此文件: http://hdl.handle.net/11455/68537
標題: Design of electrostatically actuated MEMS switches
作者: Lai, Y.L.
Chang, L.H.
關鍵字: microelectromechanical system (MEMS)
radio frequency (RF)
microwave
switches
期刊/報告no:: Colloids and Surfaces a-Physicochemical and Engineering Aspects, Volume 313, Page(s) 469-473.
摘要: In this paper, we present mechatronic design and analysis of radio-frequency (RF) microelectromechanical system (MEMS) switches with rectangular, taper, and meandering connection beam structures. The mechatronic design and analysis of the RF MEMS switches are based on both the finite element method and the full-wave electromagnetic simulation. The mechanical characteristics of the RF MEMS switches including displacement, stress, and nature frequency are studied. The electronic characteristics of the switches investigated include insertion loss, return loss, and isolation. The comprehensive mechatronics study of the RF MEMS switches provides a systematic design and analysis methodology for MEMS applications. (C) 2007 Elsevier B.V. All rights reserved.
URI: http://hdl.handle.net/11455/68537
ISSN: 0927-7757
文章連結: http://dx.doi.org/10.1016/j.colsurfa.2007.05.074
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