Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/71269
標題: A micromachined resistive-type humidity sensor with a composite material as sensitive film
作者: Su, P.G.
Ho, C.J.
Sun, Y.L.
Chen, I.C.
關鍵字: MEMS
humidity microsensor
composite material
sensing properties
electrical-properties
poly(2-acrylamido-2-methylpropane sulfonate)
thin-films
sodium
sio2
期刊/報告no:: Sensors and Actuators B-Chemical, Volume 113, Issue 2, Page(s) 837-842.
摘要: A novel resistive-type humidity microsensor was fabricated by a microelectromechanical system (MEMS) technology and thick-film technology. The microsensor was composed of a suspended planar membrane bridged to the base silicon substrate with two beams. Metal electrodes were deposited on the surface of the membrane, and a composite film of poly-[3-(methacryloylamino)propyl] trimethyl ammonium chloride and SiO2 (PMAPTAC/SiO2) was coated as a humidity-sensing material on the top of the electrodes. The humidity-sensing principle of the sensor was based on the conductivity change of coated composite film upon adsorption/desorption of water vapor. The logarithmic impedance of the microsensor measured at 1 kHz decreased linearly with increasing the humidity in the range of 30-90%RH. The applied voltage above I V did not influence the humidity response of the microsensor. The maximum difference between humidification and desiccation process was 5.1%RH at 30%RH. The influence of temperature was -0.72%RH/degrees C on average in the temperature range 15-25 degrees C and the humidity range of 30-90%RH. (c) 2005 Elsevier B.V. All Rights reserved.
URI: http://hdl.handle.net/11455/71269
ISSN: 0925-4005
文章連結: http://dx.doi.org/10.1016/j.snb.2005.03.109
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