Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/71466
標題: Characteristics of carbon coatings on optical fibers prepared by radio-frequency plasma enhanced chemical vapor deposition with different H-2/C2H2 ratios
作者: Lin, H.C.
Yu, J.F.
Shiue, S.T.
Lin, H.Y.
關鍵字: Carbon
Chemical vapor deposition
Microstructure
Morphology
induced stress voids
amorphous-carbon
substrate-temperature
films
diamond
graphite
energy
strength
surfaces
methane
期刊/報告no:: Thin Solid Films, Volume 518, Issue 24, Page(s) 7492-7496.
摘要: Characteristics of carbon coatings on optical fibers prepared by radio-frequency plasma enhanced chemical vapor deposition with different H-2/C2H2 ratios are investigated. Five kinds of carbon coatings are prepared with H-2/C2H2 ratios of 2, 4, 6, 8, and 10. Experimental results show that the deposition rate and surface roughness of carbon coatings decrease as the H-2/C2H2 ratio increases. When the H-2/C2H2 ratio changes from 2 to 8, the increase of H-2/C2H2 ratios detrimentally yields sp(3) carbon atoms and sp(3)-CH3 bonds in the carbon coatings. However, when the H-2/C2H2 ratio exceeds 8, the hydrogen retards the growth of the graphite structure. Moreover, the redundant hydrogen radicals favor bonding with the dangling bonds in the coating surface. Therefore, when the H-2/C2H2 ratio increases from 8 to 10, the amounts of sp(3) carbon atoms and sp(3)-CH3 bonds in the carbon coatings increase. At an H-2/C2H2 ratio of 8, the carbon coating exhibits excellent water-repellency and thermal-loading resistance, and so this ratio is the best for producing a hermetically sealed optical fiber coating. (C) 2010 Elsevier B.V. All rights reserved.
URI: http://hdl.handle.net/11455/71466
ISSN: 0040-6090
文章連結: http://dx.doi.org/10.1016/j.tsf.2010.05.030
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