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標題: 90奈米射頻場效電晶體特性分析及研究
Study and Analysis on 90 nm Radio-Frequency MOS Transistor
作者: 陳宏榮
Chen, Hung-Jung
關鍵字: MOS transistor
Multi-finger type
Threshold voltage
Cut-off frequency
Maximum oscillation frequency
Unconditional stability frequency
出版社: 電機工程學系所
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Bosch, “Broad-band determination of the FET small-signal equivalent circuit,” IEEE Transactions on Microwave Theoryand Techniques, Vol. 38, pp. 891-895, July 1990. [6] G. Dambrine et al., “A new method for determining the FET small-signal equivalent circuit” IEEE Transactions on Microwave Theory and Techniques, Vol. 36, pp. 1151-1159, July 1988 [7] 施敏著, 黃調元譯, 半導體元件物理與製作技術第二版, 國立交通大學出版社, 2002. [8] K. Iniewski, “A new method for the work-function difference determination using buried-channel MOS transistors,” IEEE Transactions on Electron Devices, Vol. 36, pp. 152-153, January 1989. [9] T. Yamashita, Y. Nishida, K. Eikyu, H. Oda, Y. Inoue, and K. Shibahara, “Threshold voltage modulation using implantation into substrate for Ni fully silicided Gate/High-k NMOS,” IEEE Electron Device Letters, Vol. 29, pp. 1163-1166, October 2008. [10] Asenov et al., “Simple model for threshold voltage of a nonuniformly doped short-channel MOS transistor,” IEEE Electronics Letters 27th, Vol.18, pp. 481-483, May 1982. [11] X. Zhou, K. Y. Lim, and D. Lim, “A new critical-current at linear-threshold method for direct extraction of deep-submicron MOSFET effective channel length,” IEEE Transactions on Electron Devices, Vol. 46, pp. 1492-1494, July 1999. [12] X. Zhou, K. Y. Lim, and D. Lim, “A new ‘A simple and unambiguous definition of threshold voltage and its implications in deep-submicron MOS device modeling’,” IEEE Transactions on Electron Devices, Vol. 46, pp. 807-809, April 1999. [13] C.-Y. Lu and James A. Cooper Jr., “A new constant-current technique for MOSFET parameter extraction,” IEEE Solid-State Electronics, Vol. 49, pp. 351–356, 2005. [14] J. J. Liou, A. Ortiz-Conde, and F. G. Sanchez, “Extraction of the threshold voltage of MOSFETs: an overview,” IEEE Electron Devices, pp. 31 - 38, Auguest 1997. [15] T. Ytterdal et al., “Device modeling for analog and RF CMOS circuit design,” John Wiley & Sons, 2003. [16] A. M. Mangan, S. P. Voinigescu, and M.-T. Yang, M. Tazlauanu, “De-embedding transmission line measurements for accurate modeling of IC designs,” IEEE Transactions on Electron Devices, Vol. 53, pp. 235-241, February 2006. [17] H. Cho and D. E. Burk, “A three-step method for the de-embedding of high-frequency S-parameter measurements,” IEEE Transactions on Electron Devices, Vol. 38. pp. 1371-1375, June 1991. [18] T. E. Kolding, “A four-step method for de-embedding gigahertz on-wafer CMOS measurements,” IEEE Transactions on Electron Devices, Vol. 47, pp. 734-740, April 2000. [19] B. Razavi, R.-H. Yan, and K. F. Lee, “Impact of distributed gate resistance on the performance of MOS devices,” IEEE Transactionson circuits and systems, Vol. 41, pp. 750-754, November 1994. [20] I. Kwon, M. Je, K. Lee, and H. Shin, “A simple and analytical parameter-extraction method of a microwave MOSFET,” IEEE Transactions on Microwave Theory and Techniques, Vol. 50, pp. 1503-1509, June 2002. [21] C. C. Enz and Y. Cheng, “MOS transistor modeling for RF IC design,” IEEE Transactions on Solid-State Circuits, Vol. 35, pp. 186-201,February 2000. [22] S. H.-M. Jen, C. C. Enz, D. R. Pehlke, M. Schroter, and B. J. Sheu, “Accurate modeling and parameter extraction for MOS transistors valid up to 10 GHz,” IEEE Transactions on Electron Devices, Vol. 46, pp. 2217-2227, November 1999. [23] J. Han, M. Je, and H. Shin, “A simple and accurate method for extracting substrate resistance of RF MOSFETs,” IEEE Electron Device Letters, Vol. 23, pp. 434-436, July 2002. [24] Y. Cheng, M. J. Deen, and C.-H. Chen, “MOSFET modeling for RF IC design,” IEEE Transactions on Electron Devices, Vol. 52, pp. 1286-1303, July 2005. [25] Yu-Cheng Teng, “UMC 90nm logic ang mixed-mode 1P9M low-K process design support manual,” UMC Cop., April 2009. [26] Y.-S. Lin, “An analysis of small-signal source-body resistance effect on RF MOSFETs for low-cost system-on-Chip (SoC) applications,” IEEE Transactions on Electron Devices, Vol. 52, pp. 1442-1451, July 2005. [27] C. C. Enz, “An MOS transistor model for RF IC design valid in all regions of operation,” IEEE Transactions on Microwave Theory and Techniques, Vol. 50, pp. 342-359, January 2002. [28] S. Lee, H. K. Yu, C. S. Kim, J. G. Koo, and K. S. Nam “A novel approach to extracting small-signal model parameters of silicon MOSFET''s,” IEEE Microwave and Guided Wave Letters, Vol. 7, pp. 75-77, March 1997. [29] T. Manku, “Microwave CMOS-Device physics and design,” IEEE J. Solid-State Circuits, Vol. 34, pp. 277-285, March 1999. [30] David and Pozar, “Microwave Engineering,” John Wiley & Sons, 2005. [31] T. H. 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摘要: 本論文分為兩部分,第一部分為探討90奈米多指型金氧半場效應電晶體的直流分析,藉由佈局幾何結構討論直流特性。由高的閘極偏壓及低的汲極偏壓進行量測,藉由此轉導值找出電晶體的臨界電壓,並用物理特性來討論,最後找出適合的工作偏壓。 第二部分為電晶體的高頻效應分析,由小訊號模型推導找出各寄生參數,並藉由佈局結構進行討論,最後進行各電晶體量測並由公式將各寄生值萃取出來。本文中也討論到基底效應對於電晶體高頻特性的影響,導入功率傳輸觀念,並藉由公式推導找出截止頻率、無條件穩定頻率、最大震盪頻率三個重要的高頻效能指標與寄生項之間有何關聯性,最後由效能優化指標來定義出最佳的佈局幾何結構。另外本文也討論在不同工作偏壓下電晶體高頻特性的趨勢,觀察電壓的變化對於小訊號的變化程度有何種關聯性。
This thesis includes two parts. In the first part, the DC characteristic of multi-finger type MOS transistor has been discussed with different layout geometries. Measurement shows that the high gate voltage and low drain voltage have the specific transconductance value. This value could be used to derive the threshold voltage. The semiconductor physics was used to explain the optimal DC bias voltage. In the second part, the RF characteristic has been analyzed based on previous DC bias. Investigation on the parasitic value in small-signal model has been paid in this thesis. Moreover, the parasitic effect is characterized with different layout parameters. The substrate resistance is investigated in this work. Adopting the concept of power flow, three critical parameters such as cut-off frequency (ft), unconditional stability frequency (fk), and maximum oscillation frequency (fmax) have been discussed comprehensively. Hence, the optimal layout geometry is addressed by the Figure of Merit (FoM). Results of this thesis provide valuable information to design 90 nm RF MOS transistor.
其他識別: U0005-2107200917405300
Appears in Collections:電機工程學系所



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