Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/86249
標題: Analysis of irradiance distribution in optical proximity printing of micro annulus apertures
作者: Tsai, Jhy-Cherng
Sie, Guei-Si
Fan, Jhy-Wei
URI: http://hdl.handle.net/11455/86249
ISSN: 0021-4922
1347-4065
Appears in Collections:機械工程學系所

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