Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/91371
標題: Blue laser direct synthesis and patterning of microscale silver dots on substrate
以藍光雷射直析進行微米尺度 金屬銀點製備之研究
作者: 李冠緯
Guan-Wei Lee
關鍵字: laser-direct synthesis
silver ion reaction
blu-ray optical pickup
focus error signal
雷射直析
銀離子反應
藍光雷射讀取頭
聚焦誤差訊號
引用: [1] M. Kuwahara, C. Mihalcea, N. Atoda, J. Tominaga, H. Fuji and T. Kikukawa, 2003, 'A thermal lithography technique using a minute heat spot of a laser beam for 100 nm dimension fabrication,' Topics in Applied Physics, Vol.88, pp. 79-87. [2] M. Kuwahara, J. H. Kim, J. Tominaga, 2003, 'Dot formation with 170-nm dimensions using a thermallithography technique,' Microelectronic Engineering, Vol. 67-68, pp. 651-656. [3] M. Kuwahara, et al., 2004, 'A volume change thermal lithography technique,' Microelectronic Engineering ,Vol.73-74, pp. 69-73. [4] M. Kuwahara, et al., 2005, 'Fabrication of roll imprint stamp for continuous UV roll imprinting process', Microelectronic Engineering ,Vol.78, pp. 359-363. [5] M. F. Chen, Y. P. Chen, W. T. Hsiao, Z. P. Gu, 2007, 'Laser direct write patterning technique of indium tin oxide film,' Thin Solid Films, Vol. 515, pp.8515-8518. [6] C.P. Liu, Y. X. Hung, C. C. Hsu, T. R. Jeng, J. P. 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Poulikakos, 2007, 'All-inkjet-printed flexible electronics fabrication on a polymer substrate by low-temperature high-resolution selective laser sintering of metal nanoparticles,' Nanotechnology, Vol. 18, 345202, 8pp. [11] R. D. Mancosu, J. A. Q. Quintero, R. E. S. Azevedo, 2010, 'Sintering, in Different Temperatures, of Traces of Silver Printed in Flexible Surfaces,' 11th. Int. Conf. on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE. [12] Y, Son, J. Yeo, H. Moon, T. W. Lim, S. Hong, K. H. Nam, S. Yoo, C. P. Grigoropoulos, D. Y. Yang, S. H. Ko, 2011, 'Nanoscale Electronics Digital Fabrication by Direct Femtosecond Laser Processing of Metal Nanoparticles,' Advance Meterials, Vol. 23, Issue 28, pp. 3176-3181. [13] M. T. Lee, D. Lee, A. Sherry, C. P Grigoropoulos, 2011, 'Rapid selective metal patterning on polydimethylsiloxane (PDMS) fabricated by capillarity-assisted laser direct write,' Journal of Micromechanics and Microengineering, Vol. 21, 095018, 9pp. [14] H. Andersson, C. Lidenmark, T. Öhlund, J. Örtegren, A. Manuilskiy, S. Forsberg, H. E. Nilsson, 2012, 'Evaluation of Coatings Applied to Flexible Substrates to Enhance Quality of Ink Jet Printed Silver Nano-Particle Structures,' IEEE Transactionson Components, Packagingand Manufacturing Technology, VOL. 2, NO. 2. [15] J. Yeo, S. Hong, D. Lee, N. Hotz, M. T. Lee, C. P. Grigoropoulos, S. H. Ko, 2012, 'Next Generation Non-Vacuum, Maskless, Low Temperature Nanoparticle Ink Laser Digital Direct Metal Patterning for a Large Area Flexible Electronics,' PLOS ONE, Vol. 7, Issue 8. [16] S. Hong, J. Yeo, G. Kim, D. Kim, H. Lee, J. Kwon, H. Lee, P. Lee, S. H. Ko, 2013, 'Nonvacuum, Maskless Fabrication of a Flexible Metal Grid Transparent Conductor by Low-Temperature Selective Laser Sintering of Nanoparticle Ink,' American Chemical Society, Vol. 7, pp. 5024-5031. [17] J. Lee, B. Lee, S. Jeong, Y. Kim, and M. Lee, 2014, 'Microstructure and electrical property of laser-sintered Cucomplex ink,' Applied Surface Science 307, pp. 42-45. [18] T. Baldacchini, A. C. Pons, J. Pons, C. N. LaFratta, J. T. Fouras, Y. Sun, M. J. Naughton, 2005, 'Multiphoton laser direct writing of two-dimensional silver structures,' Optics Express, Vol. 13, No. 4. [19] J. G. Liu, C. H. Chen, J. S. Zheng, J. Y. Huang, 2005, 'CO2 laser direct writing of silver lines on epoxy resin from solid film,' Applied Surface Science, Vol. 245, pp. 155-161. [20] T. Tanaka, A. Ishikawa, S. Kawata, 2006, 'Two-photon-induced reduction of metal ions for fabricating three-dimensional electrically conductive metallic microstructure,' Applied Physics Letters, Vol. 88, pp. 081107. [21] 林俊良,2006,「以雷射直寫於玻璃基板上佈植銅線之技術研究」,國立清華大學光電工程研究所碩士論文。 [22] S. Maruo, T. Saeki, 2008, 'Femtosecond laser direct writing of metallic microstructures by photoreduction of silver nitrate in a polymer matrix,' Optics Express, Vol. 16, No. 2, pp. 1174. [23] J. Xu, Y. Liao, H. Zeng, Z. Zhou, H. Sun, J. Song, X. Wang, Y. Cheng, Z. Xu, K. Sugiokaand, K. Midorikawa, 2007, 'Selective metallization on insulator surfaces with femtosecond laser pulses,' Optics Express, Vol. 15, No. 20. [24] 何依萍,2007,「利用雷射直寫佈植金屬導線之研究」,國立清華大學光電工程研究所碩士論文。 [25] S. J. Henley, S. R. Silva, 2007, 'Laser direct write of silver nanoparticles from solution onto glass substrates for surface-enhanced Raman spectroscopy,' Applied Physics Letters, Vol. 91, pp. 023107. [26] Y. Sun, H. Yan, X. Wu, 2008, 'Effects of visible and synchrotron x-ray radiation on the growth of silver nanoplates on n-GaAs wafers:A comparative study,' APPLIED PHYSICS LETTERS, Vol. 92, pp. 183109. [27] W. C. Zhang, X. L. Wu, H. T. Chen, Y. J. Gao, J. Zhu, G. S. Huang, P. K. Chu, 2008, 'Self-organized formation of silver nanowires, nanocubes and bipyramids via a solvothermal method,' ActaMaterialia, Vol. 56, pp. 2508–2513. [28] 陳志綱,2009,「準分子雷射光還原法應用於奈米銀薄膜製作」,國立中正大學光機電整合研究所碩士論文。 [29] M. T. Lee, Y. K. Liu, 2014, 'Laser Direct Synthesis and Patterning of Silver Nano/Microstructures on a Polymer Substrate,'Applied Material and Interfaces, Vol. 6, pp. 14576-14582. [30] J. Chung, S. H. Ko, N. R. Bieri, C. P. Grigoropoulos, D. Poulikakos, 2004, 'Conductor microstructures by laser curing of printed gold nanoparticle ink,' Applied Physics Letters, Vol. 84, pp. 801-803.
摘要: 本研究係使用藍光雷射直寫技術配合銀離子反應溶液低熔點的特性,利用經過調製的銀離子反應溶液,吸收藍光雷射照射時產生的熱能進而產生化學反應,使銀離子反應溶液於玻璃基板析出銀粒子,透過電腦程式的控制,操作搭載藍光雷射的奈米壓電移動平台對基板進行目標位置的雷射直析以利圖案化,最終能以化學析出的方式於玻璃或可撓性基板上製備出微米尺度的銀點。 溶液調製的部分,本研究係參考中興大學機械系李明蒼教授與其學生劉誼凱於2014年刊登於ACS Publications的論文'Laser Direct Synthesis and Patterning of Silver Nano Microstructures on a Polymer Substrate'當中,針對銀離子反應溶液的調配方式,採用氨水與醋酸銀粉末狀顆粒以及甲酸的混合,沉澱數小時之後,再混以乙二醇(Ethylene glycol,簡稱EG)成為雷射直析的溶液,而本研究係加以修改銀離子反應溶液當中乙二醇的比例(乙二醇為總體積的1/4)製成合適的藍光雷射直析溶液,將溶液滴於基板之上後,使用雷射控制器控制藍光雷射輸出,並透過程式控制奈米平台進行聚焦誤差訊號對焦與移動指令,在基板上進行雷射直析的動作,利用此系統以及調配溶液的結合,本系統能夠在雷射功率60mW、出光頻率1MHz、持續時間0.8sec的情況下在玻璃基板上直析出直徑約為1~2μm的銀金屬點。
URI: http://hdl.handle.net/11455/91371
文章公開時間: 10000-01-01
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