Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/93894
標題: Fabrication of a Micromachined Capacitive Switch Using the CMOS-MEMS Technology
作者: Cheng-Yang Lin
Cheng-Chih Hsu
Ching-Liang Dai
URI: http://hdl.handle.net/11455/93894
Appears in Collections:機械工程學系所

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