Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/98467
標題: 風扇過濾機組運轉參數對於無塵室烤箱製程空間熱、流場之影響分析
A Study of Effects on Thermal Fluid Transports with Fan Filter Units in a Clean Room Oven Area
作者: 陳弈封
Yi-Feng Chen
關鍵字: 無塵室
風扇過濾機組
微塵粒子
Clean Room
Fan Filter Unit
Dust Particle
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摘要: 本論文探討無塵室Class100區域中,烤箱製程所在區間當烤箱門扇打開與關閉時所產生的熱源對於區間中均溫性的影響。運用有限元素軟體Fluent,調整風扇過濾機組 (Fan Filter Unit, FFU)風速(0.2m/s,0.3m/s,0.4m/s,0.5m/s),分析該空間區域的溫度變化,分析模擬結果與實際現場量測所得熱流場相關數據進行比對及探討。 研究分析之無塵室空間尺寸為:長4.5m、寬4m、高7m,利用有限元素軟體分析。模擬分析結果顯示,在FFU風速為0.3m/s時,製程空間區域有最佳的均溫性,但微塵數量卻無法有效抑制。風速增加為0.5m/s時,則能有效控制微塵數量,但整體空間均溫性較差,無FFU設置區域也因風速增大而會有渦旋區域增大的狀況,使得微塵數量增加。研究分析進一步比較天花板有、無設置FFU的區域中,量測高度1m-6m的微塵數量。本研究結果顯示,最佳FFU控制風速為0.4m/s,而微塵數量主要集中在無出風口處的天花板下方,在高度1m-3m的區域內有較易出現微塵滯留現象。
This study was aimed to investigate the influence on temperature uniformity in a Class 100 clean room as the door of an oven used in the room was opened and closed during the oven process. The finite element analysis program, Fluent, was introduced for analysis. The fan filter units (FFU) were regulated to produce velocity (0.2m/s, 0.3m/s, 0.4m/s, and 0.5m/s). The temperature changes in the space were analyzed and the results from the simulation were compared with thermal flow field measured in the space. The clean room studied was sized 4.5m L * 4m W * 7m H. The results from finite element analysis revealed that the temperature uniformity in the process space was optimized when the FFU produced velocity at 0.3m/s; however, effective suppression was not achieved for the quantity of dust particles. By increasing the velocity to 0.5m/s, the dust particles control was effective but the temperature uniformity was less than satisfactory and the vortices became larger at the area without FFUs, resulting in increasing quantity of dust particles. A further look into the analysis was conducted and the dust particles quantity was measured from 1m to 6m at areas where there were provided with FFUs and those without below the ceiling. The results indicated that the optimal FFU velocity was 0.4m/s; dust particles were concentrated under the ceiling where there was no air vent; and dust particles hanging mid-air were most likely to be found between 1 m and 3 m from the floor.
URI: http://hdl.handle.net/11455/98467
文章公開時間: 2020-08-28
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