Browsing by Author Fan, Jhy-Wei

Showing results 1 to 2 of 2
Issue DateTitleAuthor(s)Text
-Analysis of irradiance distribution in optical proximity printing of micro annulus aperturesTsai, Jhy-Cherng; Sie, Guei-Si; Fan, Jhy-Wei-
-近接式微影製程之光學繞射與光阻吸附效應研究范志威; Fan, Jhy-Wei-