Browsing by Author Chang, M.W.

Showing results 1 to 5 of 5
Issue DateTitleAuthor(s)Text
-Fabrication and characterization of a microelectromechanical tunable capacitorDai, C.L.; 戴慶良; Lin, S.C.; Chang, M.W.-
-Fabrication of a micromachined tunable capacitor using the complementary metal-oxide-semiconductor post-process of etching metal layersDai, C.L.; 戴慶良; Hsu, H.M.; Liu, M.C.; Wei, M.K.; Chang, M.W.-
-Modeling and fabrication of a microelectromechanical microwave switchDai, C.L.; 戴慶良; Hsu, H.M.; Tsai, M.C.; Hsieh, M.M.; Chang, M.W.-
-A nanowire WO3 humidity sensor integrated with micro-heater and inverting amplifier circuit on chip manufactured using CMOS-MEMS techniqueDai, C.L.; 戴慶良; Liu, M.C.; Chen, F.S.; Wu, C.C.; Chang, M.W.-
-Simulation and fabrication of HF microelectromechanical bandpass filterDai, C.L.; 戴慶良; Chiang, M.C.; Chang, M.W.-