Browsing by Author Chang, P.Z.

Showing results 1 to 6 of 6
Issue DateTitleAuthor(s)Text
-Capacitive micro pressure sensors with underneath readout circuit using a standard CMOS processDai, C.L.; 戴慶良; Chang, S.C.; Lee, C.Y.; Cheng, Y.C.; Chang, C.L.; Chiou, J.H.; Chang, P.Z.-
-A circular micromirror array fabricated by a maskless post-CMOS processCheng, Y.C.; 戴慶良; Dai, C.L.; Lee, C.Y.; Chen, P.H.; Chang, P.Z.-
-A MEMS micromirror fabricated using CMOS post-processCheng, Y.C.; 戴慶良; Dai, C.L.; Lee, C.Y.; Chen, P.H.; Chang, P.Z.-
-Novel method for in situ monitoring of thickness of quartz during wet etchingLee, C.Y.; 戴慶良; Chang, P.Z.; Chen, Y.Y.; Dai, C.L.; Chen, P.H.; Lee, S.J.-
-Novel method for in-situ monitoring of thickness of silicon wafer during wet etchingLee, C.Y.; 戴慶良; Chang, P.Z.; Chen, Y.Y.; Dai, C.L.; Wang, X.Y.; Chen, P.H.; Lee, S.J.-
-Thermal effects in PZT: diffusion of titanium and recrystallization of platinumDai, C.L.; 戴慶良; Xiao, F.Y.; Lee, C.Y.; Cheng, Y.C.; Chang, P.Z.; Chang, S.H.-