Browsing by Author Chiang, S.C.

Showing results 1 to 1 of 1
Issue DateTitleAuthor(s)Text
-4-nm thick multilayer structure of multi-component (AlCrRuTaTiZr)N-x as robust diffusion barrier for Cu interconnectsChang, S.Y.; 張守一; Li, C.E.; Chiang, S.C.; Huang, Y.C.-