Browsing by Author K. S. Wu

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Issue DateTitleAuthor(s)Text
-(2000 IEDMS Symposium A,p218-p221)Low dielectric constant and high thermal stability fluorinated amorphous carbon filmsY. L. Jiang; K. S. Wu; K. S. Lin; L. H. Chen; W. H. Wu; C. H. Wu; Y. S. Liao; L. H.Chang-