Browsing by Author L. H. Chang

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Issue DateTitleAuthor(s)Text
-(2000 IEDMS Symposium A,p285-p288)High crystallinity and large grain size c-Si:H films deposition by ECR-CVDY. L. Jiang; S. H. Chen; L. H. Chen; K. S. Lin; W. H. Wu; C. H. Wu; Y. S. Liao; L. H. Chang-