Browsing by Author Lee, M.K.
Showing results 1 to 3 of 3
Issue Date | Title | Author(s) | Text |
---|---|---|---|
- | Etching characteristics and mechanism of Ba0.7Sr0.3TiO3 thin films in an inductively coupled plasma | Wuu, D.S.; 洪瑞華; Liao, F.C.; Kuo, N.H.; Horng, R.H.; Lee, M.K.; 武東星 | - |
- | Etching of platinum thin films in an inductively coupled plasma | Wuu, D.S.; 洪瑞華; Kuo, N.H.; Liao, F.C.; Horng, R.H.; Lee, M.K.; 武東星 | - |
- | Formation process and material properties of reactive sputtered IrO2 thin films | Horng, R.H.; 洪瑞華; Wuu, D.S.; Wu, L.H.; Lee, M.K.; 武東星 | - |