Browsing by Author Liang, M.S.

Showing results 1 to 3 of 3
Issue DateTitleAuthor(s)Text
-Curing process window and thermal stability of porous MSQ-based low-dielectric-constant materialsChang, S.Y.; 張守一; Chou, T.J.; Lu, Y.C.; Jang, S.M.; Lin, S.J.; Liang, M.S.-
-Mechanical property analyses of porous low-dielectric-constant films for stability evaluation of multilevel-interconnect structuresChang, S.Y.; 張守一; Chang, H.L.; Lu, Y.C.; Jang, S.M.; Lin, S.J.; Liang, M.S.-
-Properties and thermal stability of porous organic low-dielectric-constant materialsChang, S.Y.; 張守一; Jang, S.M.; Lin, S.H.; Liang, M.S.-