Browsing by Author S. H. Chen

Showing results 1 to 2 of 2
Issue DateTitleAuthor(s)Text
-(2000 IEDMS Symposium A,p285-p288)High crystallinity and large grain size c-Si:H films deposition by ECR-CVDY. L. Jiang; S. H. Chen; L. H. Chen; K. S. Lin; W. H. Wu; C. H. Wu; Y. S. Liao; L. H. Chang-
-(Materials Research Society Symposium Proceedings,507:523-528)The Structural Evolution of a-Si:H Films Prepared by Pulse RF Power Modulation with Hydrogen and Helium DilutionY. L. Jiang; M. J. Lee; S. H. Chen-