Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/10660
標題: Nd:YAG 雷射加工參數對液晶顯示器彩色光阻之特性研究
Effect of experimental parameters using Nd:YAG laser on the physical properties of color photoresist for liquid crystal display
作者: 江國本
Chiang, Kuo-Pen
關鍵字: Nd:YAG laser;Nd:YAG 雷射;color photoresist;彩色光阻
出版社: 材料科學與工程學系所
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摘要: 
彩色濾光片為液晶顯示器達到高色彩飽和度的重要元件。彩色濾光片之R(紅色)、G(綠色)、B(藍色)畫素的功能是使液晶顯示器呈現彩色化,若R、G、B畫素發生異常,其將影響液晶顯示器之亮度及對比度要求。本論文研究以波長1064nm Nd:YAG雷射在畫素異常的彩色光阻區域進行加工,光阻吸收雷射光產生的熱效應,而達到R、G、B光阻表面焦黑碳化,以遮蔽畫素亮度異常區域,可以符合液晶顯示器的製程需求。
由實驗結果得知,綠色光阻及藍色光阻在調整適當的雷射參數下,可以達到光阻表面焦黑碳化的目的。而紅色光阻對於1064nm Nd:YAG雷射光的吸收較差,其焦黑碳化的狀況不穩定。比較彩色光阻達到焦黑碳化所需之能量密度,藍色光阻為最大,其次為綠色光阻,紅色光阻為最小。
利用色彩分析儀量測綠色光阻及藍色光阻在不同的雷射參數下之表面焦黑碳化之亮度變化,發現亮度隨著雷射能量強度的增加而越暗的趨勢,即焦黑碳化程度越明顯。同時以原子力顯微鏡觀察光阻表面焦黑碳化的形貌,發現紅色光阻、綠色光阻及藍色光阻的表面焦黑碳化都是形成寬度及深度的變化,且隨著雷射能量強度的增加而遞增,主要為熱擴散所導致。

Color filter is a key part of Liquid crystal display (LCD) to achieve high color saturation. R, G, B pixels play a role of colorful LCD. If R, G, B pixels suffered abnormal process, it will affect the brightness and contrast ratio of LCD.
We use 1064 nm Nd:YG Laser to treat R, G, B photoresist by thermal effect, to let R, G, B photoresist surface charring, and shield the abnormal pixels, it will be useful for LCD process.
Green and Blue photoresist can get good surface charring by the suitable laser parameter, but Red photoresist get unstable laser light absorption, it couldn't get good charring result. Blue photoresist need larger laser energy to get surface charring than others.
We use Color analyzer to measure charring difference, the brightness is darker when the larger laser energy treat on Red, Green and Blue photoresist. For ablation width and depth, the width and the depth of photoresist is wider and deeper by the larger laser energy, it caused from laser thermal diffusing effect.
URI: http://hdl.handle.net/11455/10660
Appears in Collections:材料科學與工程學系

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