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A Study on Long-Range Single-Axis Nanometer Positioning System
Wijaya, Martinus Tony
|關鍵字:||nanometer positioning;奈米定位;feeding mechanism;piezoelectric actuator;two-stage control;fuzzy control;feedback-feedforward control;進給機構;壓電致動器;二階段式控制;模糊控制;回授-前饋控制||出版社:||機械工程學系所||引用:|| Yang, J. S., “A Study on the Design of the Driving Mechanism for a Precision Feeding System,” M.S. Thesis, Department of Mechanical Engineering of National Chung Hsing University, Taichung, Taiwan, 2004.  Higuchi, T., Yamagata, Y., Furutani, K., and Kudoh, K., “Precise Positioning Mechanism Utilizing Rapid Deformations of Piezoelectric Elements,” Proceedings of the IEEE MEMS Workshop, pp. 222-226, February 11 - 14, 1990.  Ling, S. F., Du, H., and Jiang, T., “Analytical and Experimental Study on a Piezoelectric Linear Motor,” Smart Materials and Structures, Vol. 7, No. 3, pp. 382-388, June 1998.  Furutani, K., Higuchi, T., Yamagata, Y., and Mohri, N., “Effect of Lubrication on Impact Drive Mechanism,” Precision Engineering, Vol. 22, No. 2, pp. 78-86, 1998.  Tzen, J. 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本研究主要目的是要改善單軸定位系統之機構設計以及控制，使此定位平台具有行程100 mm之要求。定位平台是由線性滑軌、進給機構及三根堆疊式壓電致動器所組合而成。精密定位系統主要是利用壓電致動器驅動進給機構，使它產生週期性的圓周運動並利用摩擦方式來撥動滑軌之表面。藉由此連續進給的方式來達成長行程精密定位之目標。另外，研究中利用Current Reality Tree理論方法來針對楊所設計之進給機構之核心問題，產生一個新的設計概念，以解決現存問題。
本研究利用TMS320F240 DSP單晶片控制面版配合控制法則來控制定位平台。從實驗結果可得，定位平台的行程可以超過90 mm，平台的最高速度為 5.8 mm/s，而平均速度為 1 mm/s。定位的穩態誤差峰對峰值小於20 nm；偏差量小於0.5 nm，以及振動幅度(1σ)小於7 nm。
This study is focusing on the improvement design and control of a long-range single-axis positioning system, which has a travel range of 100 mm. The positioning system was constructed by a linear guide, a feeding mechanism and three stacked piezoelectric actuators. The stacked piezoelectric actuators were used to drive the feeding mechanism with a circular movement, which will feed the linear guide by friction force. Through continuous feeding, an unlimited travel range positioning system can be achieved. A Current Reality Tree design methodology was used to create a new conceptual design and to solve the core problems embedded in the feeding mechanism system proposed by Yang .
For control system, two-stage control strategy was introduced for the positioning control, i.e. coarse motion control and fine motion control. At coarse motion stage, impact-drive motion combined with fuzzy control was used to accelerate the linear guide to approach the target position. At fine motion stage, stick-drive motion combined with classical feedback-feedforward control can provide a nanometer positioning accuracy.
The control algorithm was implemented on TMS320F240 DSP-based control board, and the experiment results show that the proposed feeding mechanism system with two-stage control strategy can achieve a travel range more than 90 mm with maximum velocity of 5.8 mm/s, average velocity 1 mm/s, steady state error is less than 20 nm, positioning bias is less than 0.5 nm and standard deviation is less than 7 nm.
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