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dc.contributorL. C. Linen_US
dc.contributorY. C. Huangen_US
dc.contributorM. S. Tsaien_US
dc.contributor.advisorJau-Liang Chenen_US
dc.contributor.authorWijaya, Martinus Tonyen_US
dc.identifier.citation[1] Yang, J. S., “A Study on the Design of the Driving Mechanism for a Precision Feeding System,” M.S. Thesis, Department of Mechanical Engineering of National Chung Hsing University, Taichung, Taiwan, 2004. [2] Higuchi, T., Yamagata, Y., Furutani, K., and Kudoh, K., “Precise Positioning Mechanism Utilizing Rapid Deformations of Piezoelectric Elements,” Proceedings of the IEEE MEMS Workshop, pp. 222-226, February 11 - 14, 1990. [3] Ling, S. F., Du, H., and Jiang, T., “Analytical and Experimental Study on a Piezoelectric Linear Motor,” Smart Materials and Structures, Vol. 7, No. 3, pp. 382-388, June 1998. [4] Furutani, K., Higuchi, T., Yamagata, Y., and Mohri, N., “Effect of Lubrication on Impact Drive Mechanism,” Precision Engineering, Vol. 22, No. 2, pp. 78-86, 1998. [5] Tzen, J. J., “Precise Positioning Using Piezoelectric Actuators,” Ph.D. Dissertation, Department of Mechanical Engineering of National Chiao Thung University, Hsin-Chu, Taiwan, 2002. [6] Tsai, M. S., Lee, C. H., and Hwang, S. H., “Dynamic Modeling and Analysis of Bimodal Ultrasonic Motor,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 3, No. 3, pp. 245-256, March 2003. [7] Almeida, V. A. L. de, Eiras, J. A., and Ibrahim, R. C., “A Novel Type of Piezoelectric Minimotor for Linear Displacements,” IEEE Symposium on Ultrasonics, Vol. 2, pp. 1774-1777, October 5 - 8, 2003. [8] Hashimoto, S., Ohishi, K., Ohishi T., Ishikawa, T., Kosaka, K., Egashira, Y., Kubota, H., and Ohmi, T., “Development of an Ultra-Precision Stage Control System Using Nonresonant Ultrasonic Motor,” The 29th Annual Conference of the IEEE Industrial Electronics Society, Vol. 2, pp. 1331-1336, November 2 - 6, 2003. [9] Hashimoto, H., Hino, N., Ohyama, Y., Niitsuma, M., and Ishii, C., “Positioning Control of the Finger Tip Drive Type of Linear Stage Using Disturbance Observer,” The 30th Annual Conference of the IEEE Industrial Electronics Society, Busan, Korea, November 2 - 6, 2004. [10] Nanomotion Ltd., Available on website: <> (visited on May 12, 2006). [11] Pahl, G. and Beitz, W., Engineering Design: A System Approach, 2nd edition, Springer-Verlag, New York, 1996. [12] Moura, E. C., “TOC Trees Help TRIZ,” The TRIZ Journal, September, 1999, Available on website: <> (visited on December 12, 2005). [13] Paros, J. M. and Weisbord, L., “How to Design Flexure Hinge”, Machine Design, Vol. 37, pp. 151-157, November 25, 1965. [14] Goldfarb, M. and Speich, J., “A Well-Behaved Revolute Flexure Joint for Compliant Mechanism Design, ” ASME Journal of Mechanical Design, Vol. 121, No. 3, pp. 424-429, 1999. [15] Kang, B. H., Wen, J. T. Y., Dagalakis, N. G.., and Gorman, J. J., “Analysis and Design of Parallel Mechanism with Flexure Joints,” IEEE Trans. on Robotics, Vol. 21, Issue 6, pp. 1179-1185, December 2005. [16] Fu, S. T., “Optimal Design and Characterization of a Nanometer Positioning Stage,” M.S. Thesis, Department of Mechanical Engineering of National Chung Hsing University, Taichung, Taiwan, 2001. [17] Moon, Y. M., Trease, B. P., and Kota, S., “Design of Large Displacement Compliant Joints”, Proceeding of the 27th Biennial Mechanisms and Robotics Conference, Montreal, Canada, September 29 - October 3, 2002. [18] Zadeh, L. A., “Fuzzy Sets,” Information Control, vol. 8, pp.338-353, 1965. [19] Mamdani, E. H., “Applications of Fuzzy Algorithms for Control of Simple Dynamic Plants,” Proceedings of the IEE, vol. 121, pp. 1585-1588, 1974. [20] Takagi, T. and Sugeno, M., “Fuzzy Identification of Systems and Its Application to Modeling and Control,” IEEE Transactions on System, Man, and Cybernetics, Vol. 15, No. 1, pp. 116-132, January 1985. [21] Wang, L. X., A Course in Fuzzy Systems and Control, Prentice Hall, New Jersey, 1997. [22] Lee, C. C., “Fuzzy logic in control systems: Fuzzy logic controller-Part 1,” IEEE Transactions on System, Man, and Cybernetics, vol. 20, pp. 404-418, April 1990. [23] Li, Y. F., and Lau, C. C., “Development of Fuzzy Algorithms for Servo Systems,” IEEE Control System Magazine, vol. 9, pp. 65-72, April 1989. [24] Chen, C. M., “Fuzzy Modeling and Control for a Precision Driving System with Friction Compensation,” M.S. Thesis, Department of Mechanical Engineering of National Chung Hsing University, Taichung, Taiwan, 2001. [25] Ge, P. and Jouaneh, M., “Tracking Control of a Piezoceramic Actuator,” IEEE Transactions on Control Systems Technology, Vol. 4, No. 3, May 1996. [26] Tuglie, E. D., Patrono. G., and Toreli, F., “An Extension of Feedback-Feedforward Technique to Input-Output Feedback Linearization,” IEEE Proceeding of the PES Power Systems Conference and Exposition, vol. 2, pp. 1119-1126, October 10 - 13, 2004. [27] Gere, J. M., Mechanics of Materials, 5th edition, Brooks/Cole, 2001. [28] Idogaki, T., Kanayama, H., Ohya, N., Suzuki, H., and Hattori, T., “Characteristics of Piezoelectric Locomotive Mechanism for an In-Pipe Micro Inspection Machine,” Proceedings of the International Symposium on Micro Machine and Human Science, October 1995. [29] Tzeng, Y. M., Engineering Dynamics, First Edition, Ding Mao, Taipei, 2001. [30] Rivals, I. and Personnaz, L., “Internal Model Control Using Neural Networks,” Proceedings of the IEEE International Symposium on Industrial Electronics, Warsaw, June 17 - 20, 1996. [31] Constantin, N., “Predictive Control Based on Multimodel Estimation,” Studies in Informatics and Control, Vol. 13, No. 2, June 2004. [32] Bittanti, S. and Campi, M., “Bounded Error Identification of Time-Varying Parameters by RLS Techniques,” IEEE Transactions on Automatic Control, Vol. 39, No. 5, May 1994. [33] Astrom, A. and Wittenmark, B., Adaptive Control, Addison-Wesley, 2nd edition, 1994. [34] Physic Instrumente, Nano Positioning, U.S. Edition Catalog, 1998. [35] Huang, Y. Z. and Dong, S. Y., TMS320C240 Theory and Application with C Language, First Edition, Literature Number: DMA-A235, Dmatek, Taichung, July 1992. [36] Texas Instruments, TMS320F/C240 DSP Controllers Reference Guide, Literature Number: SPRU161C, June 1999.zh_TW
dc.description.abstract本研究主要目的是要改善單軸定位系統之機構設計以及控制,使此定位平台具有行程100 mm之要求。定位平台是由線性滑軌、進給機構及三根堆疊式壓電致動器所組合而成。精密定位系統主要是利用壓電致動器驅動進給機構,使它產生週期性的圓周運動並利用摩擦方式來撥動滑軌之表面。藉由此連續進給的方式來達成長行程精密定位之目標。另外,研究中利用Current Reality Tree理論方法來針對楊[1]所設計之進給機構之核心問題,產生一個新的設計概念,以解決現存問題。 在控制器方面,可分成粗動及微動兩個階段來進行定位控制。粗動的部份是利用碰撞的方式並配合模糊控制來帶動定位平台接近目標位置。而微動部份則是以頂住帶動的方式並配合回授-前饋控制來使得平台的定位精度達到奈米等級。 本研究利用TMS320F240 DSP單晶片控制面版配合控制法則來控制定位平台。從實驗結果可得,定位平台的行程可以超過90 mm,平台的最高速度為 5.8 mm/s,而平均速度為 1 mm/s。定位的穩態誤差峰對峰值小於20 nm;偏差量小於0.5 nm,以及振動幅度(1σ)小於7 nm。zh_TW
dc.description.abstractThis study is focusing on the improvement design and control of a long-range single-axis positioning system, which has a travel range of 100 mm. The positioning system was constructed by a linear guide, a feeding mechanism and three stacked piezoelectric actuators. The stacked piezoelectric actuators were used to drive the feeding mechanism with a circular movement, which will feed the linear guide by friction force. Through continuous feeding, an unlimited travel range positioning system can be achieved. A Current Reality Tree design methodology was used to create a new conceptual design and to solve the core problems embedded in the feeding mechanism system proposed by Yang [1]. For control system, two-stage control strategy was introduced for the positioning control, i.e. coarse motion control and fine motion control. At coarse motion stage, impact-drive motion combined with fuzzy control was used to accelerate the linear guide to approach the target position. At fine motion stage, stick-drive motion combined with classical feedback-feedforward control can provide a nanometer positioning accuracy. The control algorithm was implemented on TMS320F240 DSP-based control board, and the experiment results show that the proposed feeding mechanism system with two-stage control strategy can achieve a travel range more than 90 mm with maximum velocity of 5.8 mm/s, average velocity 1 mm/s, steady state error is less than 20 nm, positioning bias is less than 0.5 nm and standard deviation is less than 7 nm.en_US
dc.description.tableofcontentsAcknowledgement i 摘要 ii Abstract iii Table of Contents iv List of Table vii List of Figure viii List of Symbol xii Chapter 1. Introduction 1 1.1 Background 1 1.2 Literature Review 1 1.3 Objective and Structure of Thesis 5 Chapter 2. Feeding Mechanism Design 7 2.1 Problem Definition 8 2.2 Current Reality Tree 10 2.2.1 Problem Analysis 12 2.3 Functional Requirement 14 2.4 Conceptual Design 16 2.4.1 Improvement Design of Enlargement Mechanism 18 2.5 Embodiment Design 19 Chapter 3. Design Analysis 21 3.1 Surface Flatness 21 3.2 Flexure Joints 22 3.2.1 Double Layer Leaf Spring 23 3.2.2 Notch Hinge 24 3.2.3 Concluding Remarks 26 3.3 Dynamic Model of Feeding Mechanism 26 3.3.1 Modeling in X Axis 27 3.3.2 Modeling in Y Axis 28 3.4 Verification of Dynamic Model Equation 30 3.4.1 ANSYS Modal Analysis 30 3.4.2 Impact Test 31 3.5 Transfer Function of Feeding Mechanism 34 3.6 System Identification of Feeding Mechanism System 35 Chapter 4. Control Strategy Design 40 4.1 Introduction to Fuzzy Theory 40 4.1.1 Fuzzy Control System 41 4.2 Fuzzy Control Design 45 4.3 Two-Stage Control Strategy 48 4.4 Feedback-Feedforward Control 49 Chapter 5. Experiment Result 52 5.1 Experimental Setup 53 5.2 PZT Characteristics Test 56 5.3 Feeding Mechanism Characteristics Test 58 5.4 Positioning at Origin 61 5.5 Impact-Drive Feedback Control Continuous Step Test 62 5.6 Impact-Drive Dead Zone Test 68 5.7 Two-Stage Control Continuous Step Test 70 5.8 Fine Positioning Test 78 5.9 Disturbance Rejection Test 81 5.10 Long-Range Positioning Test 83 5.11 Concluding Remarks 90 Chapter 6. Conclusions and Future Work 92 6.1 Conclusions 92 6.2 Future Works 93 References 95 Appendix A. Piezoelectric Material 100 Appendix B. The Flexure Joints 107 B.1 Notch Hinge 109 B.2 Leaf Spring 110 Appendix C. DSP-Based Control Board 111 C.1 TMS320F240 Digital Signal Processor 112 C.2 Digital to Analog Converter (DAC) 114 C.3 Quadrature Encoder Pulse (QEP) 115 Appendix D. Feeding Mechanism Design 117zh_TW
dc.subjectnanometer positioningen_US
dc.subjectfeeding mechanismen_US
dc.subjectpiezoelectric actuatoren_US
dc.subjecttwo-stage controlen_US
dc.subjectfuzzy controlen_US
dc.subjectfeedback-feedforward controlen_US
dc.titleA Study on Long-Range Single-Axis Nanometer Positioning Systemen_US
dc.typeThesis and Dissertationzh_TW
item.openairetypeThesis and Dissertation-
item.fulltextno fulltext-
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