Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/1622
標題: 撓性軸承微定位系統之階層式類神經模糊控制
Hierarchical Neuro-Fuzzy Control for Micropositioning Systems Using Flexural Bearings
作者: 許家維
關鍵字: Neuro-Fuzzy Control;模糊控制;Fuzzy Control;Flexural Bearings;Micropositioning Systems;撓性軸承;階層式模糊控制;類神經模糊控制;階層式類神經模糊控制
出版社: 機械工程學系
摘要: 
中文摘要
使用撓性軸承之微定位系統為無窮維度的分佈式撓性系統,若直接針對其偏微分方程式,設計控制器較為因難。本文採用[1]所推導之微定位系統完整動力學模式,提出一階層式模糊控制器,使用類神經網路之反向傳遞學習法則訓練模糊控制器參數,以達成模糊控制系統之最佳化設計。經由電腦模擬驗證,所提之控制策略可達成精密定位及主動式抑制振動能力,並與LQR控制策略進行比較。

Abstract
The micropositioning system using flexural bearings (e. g., for wafer steppers and coarse-fine positioning systems) is a system of infinite degrees of freedom. It is difficult to design the controller for the partial differential equation of the system directly. In this thesis, we use the closed-form dynamics model proposed in [1] for the design of micropositioning controller. We propose a hierarchical fuzzy control using neural network backpropagation training algorithm for the micropositioning system. Simulation results show that the suggested control strategy can actively suppress the flexible vibration and have good performance in micropositioning. Comparison with the result of LQR control is also presented.
URI: http://hdl.handle.net/11455/1622
Appears in Collections:機械工程學系所

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