Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/16418
標題: 微流體晶片結合網版印刷電極之製作與應用
Fabrication and Application of Microchip Integrated with Screen Printed Electrode
作者: 劉兆益
Liu, Chao-Yi
關鍵字: Microchip;微流體晶片;Uric acid;photoresist;尿酸;光阻
出版社: 化學系所
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摘要: 
本研究針對已開發的微流體晶片,在低階無塵等級的黃光實驗室中,進行舊有製程改良、良率提升及本實驗室黃光製程技術平台的建立。
利用負型光阻劑(THB-120N, JSR Co. Ltd)旋轉塗佈於具網版印刷電極之PMMA基板上,以光強60 mW/cm2之UV燈曝光5秒,顯影180秒後,製作出深寬比1:1(50 μm)之微流體孔道,藉由上蓋塗佈薄層光阻,於26 kgf—30 kgf黏合壓力下,將製程由較高溫(120 ℃)的製程改良於低溫(95 ℃—100 ℃)下獲得接合強度良好的微流體裝置,並於製程中加入功率100 W氧氣電漿處理,有效改善了網版印刷電極經光阻劑塗佈後所造成的表面鈍化問題;此外整合注射系統與微流體晶片並研發適合的介面。此結合了網版印刷電極之PMMA微流體晶片,成功地應用在尿酸樣品的偵測。
最後衍生已建立的製程手法,開發以PMMA為基材,搭配光阻製程製做PDMS(Polydimethylsiloxane)微流道所需之凸模,建立PDMS/Glass微流體晶片結合網版印刷感測器的技術平台。

The study of main cause were included improvement of the process in fabrication of microchip, increased the complete rate of product in the lower class lithography laboratory, and built our own technology and experiences of procedure up without cooperation with other laboratories.
In this study, we made a poly(methyl methacrlate)(PMMA)-based microchip device, integrated with screen-printed three-electrode electrochemical detector, a photoresist layer constitutes both an adhesion layer and side walls of 50 μm wide and 50 μm depth microfluidic channels on a screen-printed three electrode PMMA substrate by coated the negative photoresist(THB-120N, JSR Co. Ltd) on PMMA substrate with spin-coating, and then by exposured with UV lamp(400 nm,60 mW/cm2) for 180s.
Finally, we get good bonded PMMA/photoresist/PMMA microchip with lower temperatur(26 kgf—30 kgf) and pressure(95 ℃—100 ℃) of bonding procedure by coating photoresist on PMMA without three-electrode pattern. Besides that, we tried to detail problem of non-active electrodes on the microchip with oxygen plasma, and study the suitable injector. This system were applied in determination of uric acid and the results were good.
We made the Poly(dimethylsiloxane)(PDMS)/gass microchip by fabricating master on PMMA substrate.
URI: http://hdl.handle.net/11455/16418
其他識別: U0005-0308200613151500
Appears in Collections:化學系所

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