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標題: 微型表面聲波致動器驅動光學鏡頭之可行性研究
A feasibility study of miniaturized surface acoustic wave actuator to drive optical lens
作者: 翁揚智
Wang, Yang-Jr
關鍵字: Surface acoustic wave;表面聲波;coupling of model;finite element method;模態耦合模型;有限元素法
出版社: 機械工程學系所
引用: 【1】M. Takasaki, “An Ultrasonic X-Y Stage Using 10MHz Surface Acoustic Wave,” Ultrasonics Symposium , pp. 535-538, 1994. 【2】魏煒圻,「搶食自動對焦大餅MEMS瞄準手機相機市場」,新通訊2011 年3月號121 期 【3】L. Rayleigh, “On waves propagated along the plane surface of an elastic solid,” 1885. 【4】R. M. White and F. W. Voltmer, “Direct piezoelectric cupling to surface elastic waves,” vol. 7, APPLIED PHYSICS LETTERS, 1965. 【5】M. K. Kurosawa, M. Chiba and T. Higuchi, ‘‘Evaluation of a surface acoustic wave motor with a multi-contact-point slider,’’ Smart Mater. Struct., pp. 305-311, 1998. 【6】K. Asai, ‘‘Evaluation of the driving performance of a surface acoustic eave linear motor,’’ IEEE Ultrasonics Symposium, 2001. 【7】M. Takasaki, M. K. Kurosawa, T. Higuchi, ‘‘Optimum contact conditions for miniaturized surface acoustic wave linear motor,’’ Ultrasonics, vol. 38, pp. 51-53, 2000. 【8】M. K. Kurosawa, H. Itoh, K. Asai, M. Takasaki, and T. Higuchi, ‘‘Optimum of slider contact face geometry for surface acoustic wave motor,’’ IEEE, 2001. 【9】M. K. Kurosawa, H. Itoh, and K. Asai, ‘‘Influence of elastic deformation in surface acoustic wave motor friction drive,’’ The 11th International conference on Solid-State Seneors and Acturtors, Munich, Gemany, June, pp. 10-14, 2001. 【10】T. Shigematsu, ‘‘Nanometer stepping drives of surface acoustic wave motor,’’ IEEE Transactions on ultrasonics, Ferroelectrics, and frequency control, vol. 50, NO. 4, 2003. 【11】Y. Nakamura, M. K. Kurosawa, and T. Shigematsu, ‘‘Effects of ceramic thin coating on friction surface for surface acoustic wave linear motor,’’ IEEE Ultrasonics Symposium, 2003. 【12】T. Shigematsu, M. K. Kurosawa, ‘‘Miniaturized SAW motor with 100MHz driving frequency,’’ IEEE, 2004. 【13】T. Shigematsu, M. K. Kurosawa, ‘‘Friction drive dynamics of surface acoustic wave motor,’’ IEEE Ultrasonics Symposium, 2005. 【14】K. Sakano, M. K. Kurosawa, and T. Shigematsu, ‘‘Surface acoustic wave motor with flat plane slider,’’ IEEE, 2008. 【15】K. Haahimoto, ‘‘Surface acoustic wave devices in telecommunications modeling and simulation,’’ 2000. 【16】K. Asai, and M. K. Kurosawa, ‘‘Simulation model of surface acoustic wave motor considering tangential rigidity,’’ Electromics and communications in Japan, Prat3, vol. 87, No. 2, 2004. 【17】K. Uchino, ‘‘Ferroelectric Devices,’’ Marcel Dekker, Inc, 2000. 【18】Y. Nakamura, M. K. Kurosawa, and T. Shigematusu ‘‘Piezoelectric transformers using LiNbO3 single crystals,’’ Electronics and Communications in Japan, Part3 81(7). 1998. 【19】Philips, Data HandbookMA03, ‘‘Piezoelectric Ceramics Specialty Ferrites,’’ Philips Components, 1997. 【20】J. F. Rosenbaun, ‘‘Bulk acoustic wave theory and divices,’’ pp. 45-79, 1988. 【21】P. J. Freenstra, ‘‘Modeling and control of surface acoustic wave motors,’’ pp.25-28, 2005. 【22】M. K. kurosawa, ‘‘Friction drive simulation of surface acoustic wave motor by nano vibration,’’ 2007. 【23】R. Hull Ed., ‘‘Properties of crystalline silicon,’’ INSPEC, 1999. 【24】J. Kushibiki, I. Talanaga, M. Arakawa, and T. Sannomiya, ‘‘Accurate measurements of the acoustical physical constants of LiNbO3 and LiTaO3 single crystals,’’ IEEE Transactions on ultrasonics, Ferroelectrics, and frequency control, vol. 46, pp. 1315-1323, 1999. 【25】D. A. Spence, ‘‘Self similar solutions to adhesive contact problems with incremental loading,’’ Proc. Roy. Soc. A., vol. 305, pp. 55-80, 1968.

The cell phone market request the new cell phone become smaller, so the cell phone designer restrict every component's volume which inside the cell phone. The main stream of auto-focus actuator of cell phone is voice coil motor (VCM). But the output force of VCM will decrease proportionally when it was miniaturized. The paper introduces the surface acoustic wave (SAW) motor to satisfy the auto-focus function of smaller cell phone.
The output force of SAW motor can be expected by simulation model. But the important parameter called normal displacement amplitude of surface particle can be found only by laser Doppler vibrometer. The paper can be separate into two parts. The first, use coupling of model (COM) and finite element method (FEM) to obtain the parameter which is 25.5nm and 40.3nm. The second, taking the result into the simulation model to discuss the relationship between inter digital transducer type, applied voltage, stator size, slider size, projection geometry and the SAW motor output force. The paper contributes a consultation to SAW motor designer.
其他識別: U0005-2208201115354400
Appears in Collections:機械工程學系所

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