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標題: 六自由度微定位平台之設計與分析
Design and Analysis of Six Degree-of-Freedom Precision Positioning Stage
作者: 李ㄧ民
Li, Yi-Min
關鍵字: six-degrees-of-freedom positioning stage;六自由度定位平台;flexural structure;Check List;piezoelectric actuator;撓性結構;檢核表;壓電致動器
出版社: 機械工程學系所
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The purpose of this research is to design a six degree-of-freedom positioning stage. By using flexure hinge and piezoelectric actuator, this stage can achieve precision positioning with nanometer resolution. The Checklist method was used to solve the problem embedded in the conventional precision stage and generate a new conceptual design. We designed a positioning stage in monolithic mechanism with six degree-of-freedom.
In this thesis, the functional requirements were discussed firstly. A conceptual design was followed according to these functional requirements. Then a mathematical model of the stage was constructed. Finite element analysis with experiment was conducted to verify the design. The experiment results show that the stage can achieve a maximum displacement 13.8μm in X axis; 13.68μm in Y axis; and 18.58μm in Z axis. The stage can also achieve a maximum rotation 42.4 μrad around X axis; 351.36μrad around Y axis; and 330.44 μrad around Z axis.
其他識別: U0005-1908200613392400
Appears in Collections:機械工程學系所

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