Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/1645
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dc.contributor.advisor林麗章zh_TW
dc.contributor.author詹宗霖zh_TW
dc.date2000zh_TW
dc.date.accessioned2014-06-05T11:41:20Z-
dc.date.available2014-06-05T11:41:20Z-
dc.identifier.urihttp://hdl.handle.net/11455/1645-
dc.description.abstract中文摘要 精密運動控制為高科技和精密工業之一項核心技術。本文針對由壓電致動器驅動之CMP細進給系統,推導其數學模式並提出能達到精密定位目標之模糊控制與力量控制策略,其中模糊控制策略亦使用遺傳演算法搜尋其後件部參數最佳值,進一步提昇模糊控制之性能。 本文並以電腦模擬驗證所提控制策略之效果,模擬時配合使用Ge和Jouaneh所提的前饋補償策略,將壓電致動器本身的磁滯效應作補償。模擬結果顯示所提的控制策略確能達到精密定位目標。zh_TW
dc.description.abstractAbstract Precision motion control is indispensable for many high technology and precision industries. This thesis is aimed at the modeling and control of a CMP fine drive system using a piezoceramic actuator. First, the mathematical model of the system considering the elastic effects is derived. Then a fuzzy control and a force control for the CMP fine system are proposed. A real-coded genetic algorithm is also used to search the optimal consequent parameters of the zero-order TSK fuzzy controller. The force control law is derived based on the desired polishing dynamic force requirement. Computer simulations are presented to validate the proposed control strategies. In the fuzzy control case, the Preisach model is used for simulating the hysteresis effect of the piezoelectric actuator, and feedforward hysteresis compensation is also considered to compensate for the nonlinear hysteresis effect. Simulation results show that the proposed control strategies have good performance for the CMP fine control.en_US
dc.description.tableofcontents中文摘要 Ⅰ 英文摘要 Ⅱ 誌謝摘要 Ⅲ 目錄摘要 Ⅳ 圖表目錄 Ⅶ 符號說明 ⅩⅥ 第一章 緒論 1.1 研究動機 1 1.2 文獻回顧 3 1.3 論文大綱 8 第二章 壓電致動器磁滯效應之介紹 2.1 布列謝希(Preisach)模型之介紹 9 第三章 CMP細進給系統之數學模式與控制設計 3.1 細進給系統模型 22 3.2 晶圓表面移除率數學模型 24 3.3 壓電致動器數學模式 25 3.4 CMP細進給系統之模糊控制 30 3.5 CMP細進給系統之力量控制 33 第四章 壓電致動器磁滯效應之前饋補償和使用遺傳演算法之模糊控制設計 4.1 壓電磁滯現象之前饋補償控制設計 40 4.2 模糊控制器之設計 44 4.2.1 模糊控制 44 4.2.2 模糊控制器之隸屬函數及模糊規則 47 4.2.3 模糊推論與解模糊化 50 4.3 遺傳演算法 51 第五章 電腦模擬與討論 5.1系統參數 57 5.2 CMP研磨移除率軌跡之設計 59 5.3 模糊控制模擬結果 61 5.3.1模糊控制尺度調整因子與後件部中心值的選取 61 5.3.2 模糊控制數值模擬結果與強健性討論 63 5.4 力量控制模擬結果 66 5.4.1 力量控制各項參數的選取 66 5.4.2 力量控制數值模擬結果與強健性討論 67 第六章 結論與建議 130 參考文獻 132 作者簡歷 136zh_TW
dc.language.isoen_USzh_TW
dc.publisher機械工程學系zh_TW
dc.subject模糊控制zh_TW
dc.subject前饋補償zh_TW
dc.subject力量控制zh_TW
dc.subject壓電致動器zh_TW
dc.subject遺傳演算法zh_TW
dc.subject磁滯補償zh_TW
dc.subject微定位zh_TW
dc.titleCMP細進給系統之微定位模糊控制和力量控制zh_TW
dc.titleFuzzy Control and Force Control for a CMP Micropositioning Systemen_US
dc.typeThesis and Dissertationzh_TW
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.openairetypeThesis and Dissertation-
item.cerifentitytypePublications-
item.fulltextno fulltext-
item.languageiso639-1en_US-
item.grantfulltextnone-
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