Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/1668
標題: 瞬時干涉法球面透鏡面形輪廓量測之研究
Profilometry of spherical lens using flash interferometry
作者: 宋俊宏
Song, Chun-Hung
關鍵字: Flashphase;瞬時干涉法;Fizeau Interferometry;Fourier transform profilometry (FTP );菲佐干涉儀;傅立葉輪廓術
出版社: 機械工程學系所
引用: [1] 林穎毅 “新應用帶頭光學元件產業邁向豐收” 光連:光電產業與技術情報50期pp. 53-55(2004) [2] 呂紹旭 "風暴後的復甦-2010全球及台灣光學元件市場剖析光"連:光電產業與技術情報89期pp. 23 -26(2010) [3] 呂紹旭 "尋找數位相機代工藍海-單眼數位相機代工產業" 光連:光電產業與技術情報74期pp. 32 -35(2008) [4] 佳能公司http://cweb.canon.jp/ef/lineup/ef-s/ef-s18-55-f35-56is-ii/spec.html [5] Cho Jui Tay,Madhuri Thakur, and Chenggen Quan, "Grating projection system for surface contour measurement," Appl.Opt. Vol. 44, No. 8, pp. 1393–1400 (2005). [6] M. J. Tsai,C. C. Hung, "Development of a high-precision surface metrology system using structured light projection," Measurement Vol. 38 pp. 236–247 (2005). [7] G. Schulz,J. Schwidert, "Precision measurement of planeness," Appl. Opt. Vol. 6, No. 6, pp. 1077–1084(1967). [8] James C. Wyant,吳修雲, "精密光學檢驗",光學工程. 23期, pp. 22-26(1987). [9] M. Takeda and S. Kobayashi, "Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry, “Optical Society of America, No. 1,Vol. 72, pp. 156-162,1982 . [10] Takeda, M., Muloh, K., " Fourier transform profilometry for the automatic measurement 3-D object shapes ", Appl. Opt., Vol. 22, No. 24,pp.3977-3982, 1983. [11] Takeda, M., Muloh, K., " Fourier transform profilometry for the automatic measurement 3-D object shapes ", Appl. Opt., Vol. 22, No. 24,pp.3977-3982, 1983. [12] 舒朝濂“現代光學製造技術” 國防工業出版社pp. 76-79(2008) [13] 國家實驗研究院儀器科技研究中心 “光學元件精密製造與檢測” pp. 322-325(2007) [14] 國家實驗研究院儀器科技研究中心“儀科簡訊” 83期pp.12(2007) [15] フジ干渉計 “レーザ干渉計の基礎知識” http://fujifilm.jp/business/material/interferometer/knowledge/analysis.html [16] M. Born, E. Wolf, " Principle of Optics ", Pergamon Press, pp.464 (1964). [17] K. Creath, "Temporal Phase Measurement Methods," in Interferogram Analysis–Digital Fringe Pattern Measurement Techniques,D. W. Robinsio, and G. T. Reid, eds. pp. 97–99 (1993). [18] P. Hariharan, "The study of optical wavefronts," in optical interferometry,pp. 131-150(1985). [19] Peter de Groot, " Phase-shift calibration errors in interferometers with spherical Fizeau cavities ", Appl. Opt., Vol. 34, No. 16,pp.2856-2863(1995). [20] zygo, "Typical Interferometer Setups," . [21] zygo, “zygo儀器教育訓練手冊” [22] 黃深日,王陳磊,陳進榜,未日宏“斐索型球面干涉儀移相誤差的探討”南京理工大学光子學報 第25卷第10期pp.83-888(1996).
摘要: 
在目前的光學應用產品之中,球面透鏡元件依然占有極重要的地位,因此提高球面透鏡面形輪廓的檢測與製造精度,對於整個光學系統的性能更是重要。
球面透鏡面形輪廓量測技術,經過多年的發展,常利用相位移的方式來進行高精度的量測方法,但於一般量測環境上的實行,實有其窒礙難行之處。所以本文提出以瞬時干涉法球來測量透鏡面形輪廓量測、以實用為出發點也期望可以實現高精密度的透鏡面形輪廓量測之目的。
本文主要是利用菲佐 (Fizeau) 干涉儀來擷取單張干涉條紋,採用干涉儀傅立葉輪廓術來重建表面形貌,並經由和ZYGO干涉儀量取結果做比較,發現兩者之結果極為相近的,驗證本實驗架構的可行性。

The spherical lens elements have played an important role in the applications of current optical products up to now. Therefore, it is significant for the performance of the entire optical systems to enhance the detection of the surface profile of the spherical lens and to improve the manufacturing precision of the optical systems.
After several years' development in techniques for the measurement of the surface profile of the spherical lens, the phase shifting methods have commonly been used in high precision measurement. However, there are some obstacles to the methods because environmental noise prohibits conventional phase shifting methods. Therefore, I adopted the instantaneous interference methods to measure the surface profile of the spherical lens and to accomplish the objectives of making high precision measurement of the surface profile of the spherical lens.
Used the Fizeau interferometry to capture single interference fringes and used the Fourier interferometer techniques to reconstruct the surface topography contours. By comparing the results with the results I got by using the ZYGO interferometer, I found that the first results are similar to the second results. As a result, the feasibility of the experimental architecture was verified.
URI: http://hdl.handle.net/11455/1668
其他識別: U0005-2308201100523300
Appears in Collections:機械工程學系所

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