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標題: 利用射頻磁控濺鍍系統沉積釔鋇銅氧薄膜之微拉曼光譜及場發射電子顯微鏡特性研究
Micro-Raman spectroscopy and Transmission Electron Microscopy investigation of YBCO thin films deposited by RF-magnetron sputtering
作者: 吳函樺
Wu, Han-Hua
關鍵字: 釔鋇銅氧;YBa2C3O7-δ;射頻磁控濺鍍;拉曼光譜;3.5 場發射穿透式電子顯微鏡;RF magnetron Sputtering;Raman Spectrometer;Field Emission Transmission Electron Microscope
出版社: 物理學系所
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本論文中,我們利用射頻磁控濺鍍系統沉積釔鋇銅氧薄膜於(100)鈦酸鍶基板上,藉由X光繞射分析儀(X-ray Diffract meter,XRD)、顯微拉曼光譜儀(Microscopes Raman Spectrometer)和場發射穿透式電子顯微鏡(Field Emission Transmission Electron Microscope,TEM)等儀器,分析釔不同基板溫度的鋇銅氧薄膜晶格結構。
我們發現隨著基板溫度的改變,其超導臨界溫度(superconducting critical temperature,Tc)有明顯地差異。透過拉曼分析可發現低基板溫度的薄膜中晶格結構含有顯著地a軸取向。從微觀結構觀察到a軸取向,且晶格缺陷嚴重。而a軸取向範圍小且凌亂。隨著基板溫度的增加,由拉曼分析觀察到薄膜中的a軸取向明顯變弱。從微觀結構中,則發現a軸取向為大範圍生長。最後在基板溫度為730℃的薄膜中,已無a軸取向。

In this work, YBCO films were deposited by RF magnetron sputtering on (100) strontium titanate substrate. X-ray diffactometry, Raman spectroscopy and field emission transmission electron microscopy were used to investigate the lattice structure of the YBCO films.
The superconducting critical temperature varied significantly with the temperature of the substrate. Raman spectroscopy revealed that the lattice structure at low substrate temperature was visibly orientated a-axis.
The a-axis orientation and lattice defects in the microscopic structure were observed. And the area of the a-axis orientation was small and disordered. Raman spectroscopy revealed that the a-axis orientation became weak as the substrate temperature increased. And the area that exhibited that orientation increased in the microscopic structure. Finally, no a-axis orientation was observed at a substrate temperature of 730 ℃.
The orientations of YBCO films were clearly and easily observed by Raman spectroscopy. A suitable area can be to patterned to increase the success rate of Josephson junctions and Superconducting Quantum Interference Devices.
其他識別: U0005-0608201316264500
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