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標題: 以交流伺服馬達控制平板剛體定位之研究
Experimental Study on Positioning Control of Rigid Flat Panel with AC Servo Motor
作者: 銘, 陳 鴻
Chen, Hung-Ming
關鍵字: Servo motor;伺服馬達;X-θ table;PID control;Close loop control;X-θ平台;PID控制;閉迴路控制
出版社: 機械工程學系所
引用: [1]Awabdy B. A., Wu C.S., and Auslander D.M., “ Nanometer positioning of a linear motion stage under static loads”, IEEE/ASME Transactions on mechatronics, 1998 ,June ,Vol.3, No.2, pp.113-119. [2]Bodson M., Chiasson N. J., Novotnak R. T., and Rekowski R. B.,“High-performance nonlinear feedback control of a permanent magent steppermotor”, IEEE Transaction on Control System Technology, 1993, Vol. 1, No. 1,pp. 5-14. [3]Callender A., Hartree D. R. and Porter A., “Time-lag in control system”, Philosophical Transactions of the Royal Society of London, 1936, A235(756), pp. 415-444. [4]Carrica D.O., Gonzalez S.A., and Benedetti M., “A high speed velocity control algorithm of multiple stepper motors”, Mechatronics, 2004, Vol. 14, pp. 675-684. [5]Chang S. H. and Li S. S., “A high resolution long travel friction-drive micropositioner with programmable step size”, Review of Scientific Instruments,1999, pp. 2776-2782. [6]Chang S. H., Tseng C. K. and Chien H. C., “An ultra-precision XYΘZpiezo-micropositioner. I. design and analysis”, IEEE Transaction on Ultrasonics,Ferroelectric, and Frequency Control, 1999, Vol. 46, No. 4, pp. 897-905. [7]Chang S. H., Tseng C. K. and Chien H. C., “An ultra-precision XYΘZ piezo-micropositioner. II. Experiment and performance”, IEEE Transaction on Ultrasonics,Ferroelectric, and Frequency Control, 1999, Vol. 46, No. pp. 906-912. [8]Fan, K.C., “A non-contact automatic measurement for free-form surface profile”, Computer Integrated Manufacturing System, 1997, Vol. 10, No. 5, pp. 277-285. [9]Hara, A. and Sugimoto, K., “Synthesis of parallel micromanipulators”, ASME Journal of Mechanism, Transmissions, and Automation in Design, 1989, Vol. 49, No. 12, pp. 1735-1740. [10]Heil J., Bohm A., Primke M., and Wyter P., “Versatile three-dimensional cryogenic micropositioning device”, Review of Scientific Instruments, 1996, Vol. 67, No. 1, pp. 307-311. [11]Her, A. and Chang, J., ”A linear scheme for the displacement analysis of micropositioning stage with flexure hinges”, ASME Transaction, Journal of Mechanism Design, 1994, Vol. 116, No. 3, pp. 770-776. [12]Kanai A., Sano H., Yoshioka J., and Miyashita M., ”Positioning of a 200kgcarriage on plain bearing guideways to nanometer accuracy with force-operated linear actuator”, Nanotechnology, 1991, Vol. 2, pp. 43-51 [13]Lewin C., “Motion control gets gradually better,” Machine Design, 1994, pp. 90-94. [14]Minorsky N., “Directional stability of automaticakky steered body”, Journal of American Society Naval Engineers, 1922, 42(2), No. 2, pp. 280-309. [15]Mizumoto H., Nomura K., Matsubara T., and Shimizu T., “An ultraprecision positioning system using a twist-roller friction drive”, Precision Engineering, 1993, Vol. 15, pp. 180-184. [16]Mizumoto H., Yabuya M., Shimizu T., and Kami Y., “An angstrom-positioning system using a twist-roller friction drive”, Precision Engineering, 1995, Vol. 17, pp. 57-62. [17]Nomura T. and Suzuki R., “Six-axis controlled nanometer-order positing stage for microfabrication”, Nanotechnology, 1992, Vol. 3, pp. 21-28. [18]Tanaka, M., “The dynamic properties of monolithic mechanism with flexure hinges for precision control of orientation and position”, Japanese Journal of Applied Physics, 1983, Vol. 22, No. 1, pp. 193-200. [19] Wang W. and Ilene B-V., “A high precision micropositionerbased on magnetostrction principle”, Review of Scientific Instruments, 1992,Vol. 3, No. 1, pp. 21-28 [20]Wang W. and Tian H., “A high precision icropositioner with five degrees of freedom based on an electromagnetic driving principle”, Review of ScientificInstruments, 1996, Vol. 67, No. 1, pp. 312-317. [21]Zigler J. G., and Nichols N. B., “Optimum settings for automatic controllers”, Transactions of the Royal Society of London, 1936, A235(756), pp. 415-444. [22] 劉瑞弘,”X-Y 平台之高速精密定位控制”,國立中山大學,機械工程學系碩士論1999。 [23] 朱延朗,“微精密定位平台之機電整合與特性分析”,國立雲林科技大學,機械工程學系,碩士論文,2000。

The aim of present investigation is to efficiently control the accuracy of workpiece center. The linear motion in X direction is guided by a pair of parallel bolt screws fixed at both ends. Both the linear and the rotational motions are driven by two servo motors separately. A laser displacement sensor, coupled with PID fully close control loop, was employed for controlling the motion of the working table. The center positions of the workpiece are experimented for various initial workpiece center positions relative to the motor center.

The important findings are:

1.Horizontal and vertical distance between the centers of the motor and the workpiece, the size of workpiece and payload are the key parameters that affect significantly the positioning of the workpiece. In the present study, it takes only three steps to center the workpiece accurately.

2.The account of adjustable angular displacement of the workpiece reduces as the horizontal and vertical distance between the centers becomes large and small, respectively. It also decreases for the large size of workpiece.

3.When satisfying the required position criterion, the error of the vertex of the workpiece is small for large horizontal and/or small vertical distance between the centers.

4.For the same initial horizontal and vertical distance between the centers, the final biased angular displacement will reach a certain value. This value decreases as the horizontal distance increases or/and the vertical distance decreases.

5.When the payload weights 1 kilogram, large fluctuation occurs during the long-range movement at the beginning stage; however, the influence is insignificant in the short-range or the final stage positioning.
其他識別: U0005-2908200619210900
Appears in Collections:機械工程學系所

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