Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/17782
標題: 振樑式荷重元之有限元素分析與最佳化設計
Finite Element Analysis and Optimal Design of The Vibration Beam Load Cell
作者: 黃翊宸
Huang, Yi-Chen
關鍵字: finite element method;有限元素法;electric force;vibration;frequency;靜電力;振動;頻率
出版社: 應用數學系所
引用: [1] R. M. Langdon,“Resonator Sensors–a Review”,Journal of Physics E:Sci. Instrum.,Vol. 18,pp.103-118,1985。 [2] C. Gehin、C. Barthod and Y. Teisseyre,“Design and Characterization of a New Force Resonant Sensor”,Sensors and Actuators,Vol. 84,pp.65-69,2000。 [3] K. Fukuzawa、T. Ando、M. Shibamoto、Y. Mitsuya and H. Zhang,“Monolithically Fabricated Double-Ended Tuning-Fork Based Force Sensor”,Journal of Applied Physics,Vol. 99,p.094901-094901-5,2006。 [4] T. Yan、B. E. Jones、R. T. Rakowski、M. J. Tudor、S. P. Beeby and N. M. White,“Metallic Triple-Beam Resonant Force Sensor with Thick-Film Printed Piezoelectric Vibration Excitation and Detection Mechanisms”, Electronics and Computer Science,Vol. 15,pp.77-82,2004。 [5] A. Cheshmehdoost and B. E. Jones,“Design and Performance Characteristics of an Integrated High-Capacity DETF-Based Force Sensor”,Sensors and Actuators,Vol. 52,pp.99-102,1996。 [6] A. Vidic、D. Then and Ch. Ziegler,“A New Cantilever System for Gas and Liquid Sensing”,Ultramicroscopy,Vol. 97,pp.407-416,2003。 [7] http://www.itri.org.tw/chi/services/ieknews/ml602-b10-01314-4888-0.doc [8] E. Sarraute and I. Dufour,“Analytical Modeling of Beam Behavior Under Different Actuations”,Journal of Modeling and Simulation of Microsystems,Vol. 1,p.57-64,1999。 [9] ANSYS Release 10.0 Documentation,ANSYS Inc,Canonsburg,2005。 [10] P. Raback and A. Pursula,“Finite Element Simulation of the Electro Mechanical Pull-in Phenomenon”,ECCOMAS,pp.24-28,2004。 [11] J. R. Gilbert、G. K. Ananthasuresh and S. D. Senturia,“3D Modeling of Contact Problems and Hysteresis in Coupled Electro-Mechanics”,MEMS,Vol. 96,pp.127-132,1996。 [12] M. Gyimesi、D. Ostergaard and I. Avdeev,“Triangle Transducer for Micro Electro Mechanical Systems(MEMS) Simulation in ANSYS Finite Element Program”,NSTI,Vol. 1,p.380-383,2002。 [13] D. S. Randall、M. J. Rudkin、A. Cheshmehdoost and B. E. Jones,“A Pressure Transducer Using a Metallic Triple-beam Tuning Fork”,Sensors and Actuators,Vol. 60,pp.160- 162,1997。 [14] T. Yan、B. E. Jones、R. T. Rakowski、M. J. Tudor、S. P. Beeby and N. M. White,“Design and Fabrication of Thich-Film PZT-Metallic Triple Beam Resonators”,Sensors and Actuators,Vol. 115,p.401-407,2004。 [15] T. Yan、B. E. Jones、R. T. Rakowski、M. J. Tudor、S. P. Beeby and N. M. White,“Metallic Triple Beam Resonator with Thick-Film Printed Drive and Pickup”,Electronics and Computer Science,Vol. 17,pp.10-13,2004。
摘要: 
本研究主旨在利用有限元素軟體ANSYS,對振樑式荷重元進行數值模擬與分析,並針對影響其結果的相關因素進行修改,討論振樑式荷重元最佳化的可能性與設計方向。

振樑式荷重元因承受不同的重量或力量作用時,彈性體變形使得內部振樑受不同的內力(拉力)作用,因而導致振樑振動時頻率的改變。利用感測頻率的變化,來獲得重量或力量與頻率間的關係,即振樑式荷重元主要的原理。

本研究將振樑式荷重元分析步驟分為靜態和暫態分析;前者討論在不同重量作用下,振樑受拉力大小;後者再導入靜電力來驅動受拉力作用後的振樑,觀察振樑振動時電容變化的情形,獲得重量與電容頻率的關係。再根據分析結果,針對模型幾何尺寸進行修改,使振樑式荷重元能獲得比原始設計更佳的尺寸,提供往後針對相關的研究一些參考。

The purpose of this study proceed to the numerical simulation and analysis of the vibration beam load cell by using finite element software ANSYS. Discuss the optimization possibility and design direction of the vibration beam load cell by revising the relevant factors which influence the result.

Because of different weight or force acting on the vibration beam load cell, the elastomer switch them to the vibration beam and result in different traction on it, which result in different vibration frequency. By sensing the change of the vibration frequency, we can get the relationship between weight or force and
frequency. This is the main principle of the vibration beam load cell.

In this paper, we divide the analysis procedure into static and dynamic analysis, the former discuss the relationship between different weight or force and traction on beam, the latter use the electric force to drive the vibration beam and observe the capacitance changed when vibrating. Finally, we can get the relationship between weight or force and the capacitance frequency. Finally according to the result, directing to relevant dimensions to modify, let the vibration beam load cell can have a better result than original model. Give some references to the forwards analysis.
URI: http://hdl.handle.net/11455/17782
其他識別: U0005-2007200718442300
Appears in Collections:應用數學系所

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