Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/1793
標題: 單軸長行程定位系統之控制研究
The Study on The Control of Long-Range Single-Axis Nanometer Positioning System
作者: 李信儀
Li, Sin-Yi
關鍵字: nanometer;奈米;velocity;DSP;linear guide;piezoelectric actuator;fuzzy control;速度;單晶片;線性滑軌;壓電致動器;模糊控制
出版社: 機械工程學系所
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摘要: 
本研究主要是針對一單軸長行程定位系統做速度之分析與研究。定位平台架構由驅動機構、線性滑軌、控制器所組成。驅動機構由壓電致動器、平板彈簧、撓性鉸鍊所組成。運動方式為輸入正弦波命令至壓電致動器,使其產生週期性運動,並驅動機構利用摩擦方式撥動線性滑軌。
研究目的在於使本定位系統之速度提昇至符合實際應用之進給速度。研究中藉由頻率與速度關係實驗確立兩者呈正相關,並測試出本研究中之最高操作頻率為5k Hz。而在控制方面,分為全速模式及微動模式,在全速模式中使用最高操作頻率做開迴路控制,在微動模式中則使用模糊控制作為補償之控制法則。
實驗結果可得,最大移動距離為80mm。其速度表現在平均速度為6.53mm/s,最大速度為10.19mm/s。而在定位精度表現上,穩態誤差為20nm以內,最小步階量為50nm。同時藉由軟體分析可得知驅動機構可使用次數達100萬次循環以上。

This study focuses on the velocity analysis for a long-range single-axis positioning system. First, the positioning system consists of driving mechanism, linear guide and digital signal processing (DSP) controller. In this case, the driving mechanism comprises piezoelectric actuator, leaf spring, and flexure hinge. Moreover, the positioning system inputs a sine wave to piezoelectric actuator to produce a periodic movement and feeds linear guide with a friction force.
The objective of this study is to increase the feeding speed for practical applications. It verifies that there is a positive correlation between frequency and velocity and the highest operating frequency is 5k Hz. For the control system, it can be divided into the high speed mode and the tiny movement mode. In the high speed mode, it uses the highest operating frequency for the open-loop control. On the other hand, it uses fuzzy control as compensation in the tiny movement mode for the close-loop control.
In final analysis, first, the experiment results show that the maximum stroke of the positioning system is 80mm, the average velocity is 6.53mm/s and the maximum velocity is 10.19mm/s. Second, the steady state error is less than 20nm and the minimum step size is 50nm of the positioning accuracy. Third, the life cycle of the driving mechanism is more than one million cycles.
URI: http://hdl.handle.net/11455/1793
其他識別: U0005-0508200715091700
Appears in Collections:機械工程學系所

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