Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/1828
標題: 利用接觸角量測儀評估銅在玻璃表面上的濺鍍分佈
Assessment of Sputtering Distribution of Copper Deposited on Glass Surface Using Contact Angle Analyser
作者: 粘銘輝
Nian, Ming-Hui
關鍵字: sputtering;濺鍍;pollution;contact angle;surface energy;污染;接觸角;表面能
出版社: 機械工程學系所
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摘要: 
本文利用接觸角量測儀評估銅在玻璃表面上的濺鍍分佈,並藉此濺鍍分佈用以模擬固體表面所受到的污染程度。在實驗中,將使用鍍膜機濺鍍銅在玻璃試片上,用改變鍍膜時間長短的方法來模擬銅在玻璃試片的污染程度,並生產出厚薄不等的銅膜試片,透過已知表面張力參數的三種溶液(水、甲醯胺、乙二醇)滴在各試片上,加以量測取得其接觸角,再配合楊氏方程式所推演出的路易斯酸/鹼基方程式,即可獲得各試片的表面能變化趨勢,並評估銅分佈在玻璃表面上的情況。

根據實驗結果顯示,可以發現,鍍膜時間的長短會影響到接觸角和表面能的大小,在鍍膜幾分鐘內,量測溶液在試片的接觸角會有較大幅度的改變;而鍍膜時間一久的話,其接觸角之間變化的趨勢則已經較不明顯。以整體來看,可以觀察到玻璃在濺鍍後,試片會隨著污染程度的增加而透光性變低,量測溶液在試片的接觸角變小,試片表面能增加,而銅在玻璃上的分佈也越來越密集。

Assessment of sputtering distribution of copper deposited on glass surface using contact angle analyzer, and takes advantage of the sputtering distribution to simulate the pollution of solids surface receives in the paper. In the experiment will use the film plating machine sputtering copper deposited on the glass, change coating time to simulate the pollution of copper deposited on the glass, and produced samples of different thickness copper film. The contact angles formed by three kind of liquid with known surface tension parameter (water, formamide, ethylene glycol) drops on the solid surface are measured. The surface energy change tendency of samples involved in the Young´s equation is then numerical calculated in conjunction with the use of the Lewis acid/alkali base model. Assessment of distributes situation of copper deposited on the glass surface.

The experimental results show that the coating time length can affect the contact angle and the surface energy. In coating several minutes, the contact angle has greater scope change that liquid on the glass. But coating time is relatively longer, it is not more obvious that changed of contact angle. With whole to see, can observe glass after sputtering, samples diaphaneity be low along with the pollution increase, the contact angle of liquids on the glass will diminish, the surface energy of samples increase, and the distribution of copper deposited on the glass is more and more intensive.
URI: http://hdl.handle.net/11455/1828
其他識別: U0005-1207200711291500
Appears in Collections:機械工程學系所

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