Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/1849
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dc.contributor.advisor蔡志成zh_TW
dc.contributor.advisorJhy-Cherng Tsaien_US
dc.contributor.author張凱榮zh_TW
dc.contributor.authorAlex-Changeen_US
dc.date2005zh_TW
dc.date.accessioned2014-06-05T11:41:51Z-
dc.date.available2014-06-05T11:41:51Z-
dc.identifier.urihttp://hdl.handle.net/11455/1849-
dc.description.abstract本研究利用厚透鏡理論推導數值孔徑(NA)與球形透鏡無因次化參數高徑比(h/D ratio)的關係,再透過模擬分析找出NA較高的幾何型態,並且探討利用熱熔法製作此類型微透鏡時,不同基材特性對微透鏡NA的影響。文中除了推導透鏡幾何對NA的影響外,並且藉由量測光阻在不同基材上的接觸角,分析在各類基材上製作微透鏡之效果,再設計實驗以改變基材的方式實際製作不同幾何形貌的微透鏡。實驗透過光罩的設計,成功地在不同基材上製作出直徑30μm與40μm的微透鏡陣列,實驗結果顯示利用鐵弗龍塊材所製作的微透鏡形貌接近半球狀,其NA可達0.42,此與由量測接觸角所預測的趨勢一致。而為進一步探討基材的表面粗糙度對微透鏡成形之影響,本研究亦規劃以不同表面粗糙度之玻璃、矽晶圓以及鐵弗龍塊材為基材進行微透鏡的製作,結果顯示表面愈粗糙的基材所成形的微透鏡高徑比愈大,亦即NA愈高,此亦與由表面能所預測的趨勢一致。本研究的主要貢獻在於利用厚透鏡理論推導出較嚴謹的NA與球形透鏡高徑比的關係,並透過實驗驗證以熱熔法製作微透鏡時,其高徑比與由量測光阻於基材上接觸角所預測的趨勢一致,亦與由表面能所預測的趨勢一致。zh_TW
dc.description.abstractThis paper first derived the relationship between NA and the height/diameter ratio (h/D) as a dimensionless geometric parameter of lens via thick-lens theory. Geometric characteristics for lens with high NA are analyzed and simulated. Effects of different substrates on the NA of microlens, fabricated by reflow process using photoresist, are also investigated. Geometry of microlens is analyzed based on the contact angle, measured from the photoresist on different substrates with experiments. Micrlens arrays with diamters of 30μm and 40μm are successfully fabricated with photolithography. Experimental results showed that microlenses on tefelon can reach semi-spehere with NA close to 0.42. This is consistant with the geometric model analyzed bycontact angels. Further experimental investigation on the effects of surface roughness of substrate on the lens geometry are then designed and conducted. Substrates with high contact angle, including glass, silicon wafer and tefelon block, are grounded to different surface condition before the photoresist coated. Microlens arrays are fabricated via reflow process. The results showed that substrate with high surface roughness results in high NA of microlens. This also consists with the model predicted by the surface energy. The main contributions of this research include: (i) verifying the relationship between the h/D ratio and the NA for thick lens, and (ii) experimental verification on the geometry of microlens based on the surface energy and contact angle between the substrate and photoresist.en_US
dc.description.tableofcontents摘要 i ABSTRACT ii 致謝 iii 目錄 iv 圖目錄 vii 表目錄 xi 符號表 xii 第一章 緒論 1 1.1 研究動機與目標 1 1.2 研究方法與步驟 2 1.3 本文大綱 3 第二章 文獻回顧 4 2.1 熱熔型微透鏡製程回顧 4 2.2 高NA透鏡之製程回顧 6 2.2.1 微模具製作高NA透鏡 6 2.2.2 以ICP蝕刻製作高NA折射式GaN微透鏡 8 2.2.3 以灰階光罩製作高NA繞射式GaN微透鏡 9 2.3 基材粗糙度與疏水性之回顧 9 2.4 透鏡NA之一般算法 11 第三章 高NA微透鏡之設計 14 3.1.1 透鏡曲率、聚焦長度、主平面與透鏡高度h、直徑D之關係 14 3.1.2 NA之推導與模擬 17 3.2 過半球NA理論推導 21 3.2.1 透鏡曲率、聚焦長度、主平面與透鏡高度h、直徑D之關係 21 3.2.2 NA之推導與模擬 24 3.3 透鏡NA綜合比較 27 第四章 高NA微透鏡之製程原理與規劃 31 4.1 製程規劃與原理 31 4.1.1 製程規劃 31 4.1.2 製程原理 32 4.1.3 基材吸附功與接觸角之關係 33 4.1.4 基材吸附功與粗糙度之關係 34 4.2 實驗儀器設備說明 34 4.2.1 動態表面張力儀 35 4.2.2 3D表面輪廓儀 36 4.2.3 光學顯微鏡 38 4.2.4 掃描式電子顯微鏡 39 4.2.5 晶片研磨機 42 4.3 實驗基材之選擇與量測 43 4.3.1 基材接觸角之量測 43 4.3.2 基材表面粗度之量測 44 4.4 微透鏡之製作流程 45 4.5 光罩的設計與製作 47 4.6 微透鏡接觸角的換算方法 47 4.6.1 半球內θ與h/D之關係推導 48 4.6.2 過半球θ與h/D之關係推導 50 第五章 高NA微透鏡試製與量測 53 5.1 不同基材對微透鏡成形之實驗探討 53 5.1.1 矽晶圓 53 5.1.2 玻璃 56 5.1.3 鐵弗龍塊 59 5.1.4 不同基材之結果分析與比較 62 5.2 不同粗糙度對微透鏡成形之實驗探討 66 5.2.1不同粗糙度基材之備製與量測 66 5.2.2不同粗糙度基材之微透鏡試製與量測 68 5.2.3不同粗糙度基材之結果分析與比較 74 5.2.4不同粗糙度基材實驗之討論 77 第六章 結論與未來展望 79 6.1 結論 79 6.2 未來展望 80 參考文獻 82 附錄一曝光機簡介 85 附錄二量測數據 86 附錄三 本研究其他基材之實驗量測圖 87 附錄四 不同粗糙度之鐵弗龍塊材與矽晶圓尺寸量測圖 99zh_TW
dc.language.isoen_USzh_TW
dc.publisher機械工程學系zh_TW
dc.subject數值孔徑zh_TW
dc.subjectNAen_US
dc.subject熱熔法zh_TW
dc.subject基材zh_TW
dc.subjectReflowen_US
dc.subjectsubstrateen_US
dc.title熱熔法製作之微透鏡基材對數值孔徑影響之探討zh_TW
dc.titleA Study on the Effects of Substrate on the Numerical Aperture of Microlens Fabricated by Reflow Processen_US
dc.typeThesis and Dissertationzh_TW
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.openairetypeThesis and Dissertation-
item.cerifentitytypePublications-
item.fulltextno fulltext-
item.languageiso639-1en_US-
item.grantfulltextnone-
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