Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/1900
標題: 白光相移干涉術於表面形貌量測之研究
White Light Phase Shifting Interferometry for Surface Profilometry
作者: 張家源
Chang, Chia-Yuan
關鍵字: White light interferometer;零階干涉條紋鑑定法;Surface profile;White light phase shifting interferometry;Fringe order identification;相位移法;白光干涉儀;表面形貌;白光相移干涉術
出版社: 機械工程學系所
引用: [1] Patrick Sandoz and Gilbert Tribillon. Profilometry by zero-order interference fringe identification. Journal of Modern Optics 1993;40:1691-1700. [2] Byron S. Lee, Timothy C. Strand. Profilometry with a coherence scanning microscope. Applied Optics 1990;29: 3784-3787. [3] Peter de Groot, Leslie Deck. Three-dimensional imaging by sub-Nyquist sampling of white-light interferograms. Optics Letters 1993;18:1462-1464. [4] Leslie Deck, Peter de Groot. High speed noncontact profiler based on scanning white light interferometry. Applied Optics 1994;33:7334-7338. [5] Patrick Sandoz. An algorithm for profilometry by white light phase shifting interferometry. Journal of Modern Optics 1996; 43:1545-1554. [6] Patrick Sandoz. Unambiguous profilometry by fringe order identification in white light phase shifting interferometry. Journal of Modern Optics 1997;44:519-534. [7] Oleksander A. Skydan, Francis Lilley, Michael J. Lalor, and David R. Burton. Quantization error of CCD cameras and their influence on phase calculation in fringe pattern analysis. Applied Optics 2003;42:5302-5307. [8] P. Hariharan, Maitreyee Roy. White light phase stepping interferometry for surface profiling. Journal of Modern Optics 1994;41:2197-2201. [9] Akiko Harasaki, Joanna Schmit, James C. Wyant. Improved vertical scanningi interferometry. Applied Optics 2000;39:2107-2115. [10] Prentice Hall. Frank L. Pedrotti S.J., Leno S. Pedrotti. Introduction to optics. Second Edition. ISBN 0-13-501545-6. [11] 凌維成,「白光干涉於微型元件表面形貌量測之應用」,國立中興大學機械研究所碩士論文,民國九十四年. [12] 范光照、張郭益,[精密量測],高立圖書有限公司,民國94年
摘要: 
隨著工業界的技術發展,許多微型元件已達奈米等級,為了量測目的而發展出許多量測的方法,其中非接觸式的光學量測更是未來的發展趨勢,例如相位移法等。然而傳統的相位移法在量測不連續面上有著相位的不確定性這問題存在。
本研究為了解決相位不確定性使用傳統的零階干涉條紋鑑定法結合相位移法的白光相移干涉術。結果發現可以在不影響量測精度下可以解決相位不確定性。本文中利用Nikon的50倍Mirau式干涉物鏡、Hayashi 150 UE白光光源產生機和PI的PZT線性平台,架設Mirau式白光干涉儀。首先找出干涉影像中最大亮度值的PZT掃描位置,之後配合七步相位移法算出相對相位。最後條紋鑑定法來得到絕對相位值還原代測表面形貌高度。
本研究比零階干涉條紋鑑定法更縮短量測時間且不必受到溫度變化影響量測的精度。最後討論本實驗關於PZT的誤差以及影像量化誤差對整個量測精度的影響。
URI: http://hdl.handle.net/11455/1900
其他識別: U0005-2408200710084000
Appears in Collections:機械工程學系所

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