Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/1987
標題: 撓性軸承微定位系統汁解析數學模式與控制設計
Modeling and Control for Micropositioning System Using Flexural Bearings
作者: 蔡佳宏
Tsai, Jia-Horng
關鍵字: flexural bearing;撓性軸承;optimal control;adaptive control;最佳控制;適應控制
出版社: 機械工程學系
摘要: 
使用撓性軸承的微4 位系統4 屬於無窮維度的分佈式撓性系統,若直
接針對其偏微分方程式,設計控制器較為困難。本文利用假設模態法與最
小平方法,推導撓性軸承之運動方程式,並結合致動器模型,構成使用撓
性軸承之微定位系統的完整數學模式。控制器設計方面,首先在系統參數
完全已知的狀況下,以LQ最佳化控制方法設計控制器;並針對系統參數據
不確定性時,設計一輸出回授之模式追隨適應控制器(MRAC),以提昇控制
策略的強健性。最後藉由電腦模擬,驗證所提控制策略可達成定位和主動
式抑振目標。

The micropositioning system using flexure bearings(e.g.,for
wafer stepper and coarse-fine positioning systems) is a system
of infinite degrees of freedom. It is difficult to design the
controller for the partial differential equation of the system
directly. In this thesis, an analytical dynamic model is first
developed using the assumed modes and least squares method, Then
the LQ control theory is used to design an optimal controller
when the plant parameters are perfectly known. Furthermore an
adaptive controller with outputfeedback is also proposed for
improving the robustness of the micropositioningcontrol system
with respect to parameter uncertainty. Finally, simulation
results show that the suggested control strategy can actively
suppress the flexible vibration and have good performance in
micropositioning.
URI: http://hdl.handle.net/11455/1987
Appears in Collections:機械工程學系所

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