Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/2038
標題: 圖案化氧化鋁/金屬同軸奈米柱陣列製備
Fabrication of patterned alumina-metal coaxial nanorod arrays
作者: 許哲瑋
Hsu, Che-Wei
關鍵字: nanorod;奈米柱;patterned;coaxial;圖案化;同軸
出版社: 機械工程學系所
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摘要: 
本研究以多孔性氧化鋁模版之阻障層奈米半球型陣列結構為基版,先以磷酸將其阻障層厚度減少,接著利用微影製程圖案化阻障層,讓特定區域之阻障層被完全移除,再蒸鍍導電金屬作為電鑄製程用之電極,接著利用奈米電鑄技術,將金屬鎳沈積於奈米孔洞中,最後再利用磷酸來蝕刻氧化鋁,形成氧化鋁/金屬鎳同軸奈米柱。
本研究亦利用能量光譜儀(EDS)、穿透式電子顯微鏡(TEM)、選區繞射(SAED)之分析結果驗證氧化鋁/金屬同軸奈米柱之結構,由於氧化鋁/金屬同軸奈米柱包覆著一層氧化鋁作為絕緣層,未來可用於細胞內之不同位置偵測其阻抗、自然震動頻率、頻率響應、離子濃度梯度之離子滲透效應等基本特性。

In this research, the orderly uneven barrier-layer surface of an anodic aluminum oxide (AAO) membrane was used as a template. The surface structure of the barrier-layer was modified by etching using phosphoric acid. Following, certain specific area of the barrier-layer was then removed by photolithographic process. A thin Au film was deposited on the photolithographic patterned barrier-layer surface by evaporation as the electrode for further electrochemical deposition. Nickel nanorods were electrochemically deposited into the nanochannels of the patterned AAO template. Phosphoric acid was then used to gradually etch off the alumina that enclosed each individual metal nanorod to form a alumina-metal coaxial nanorod array.
The alumina/nickel coaxial structure was characterized by energy dispersive X-ray (EDS) analysis, transmission electron microscope (TEM) analysis, and selected area electron diffraction (SEAD) analysis. The high aspect ratio of the alumina-metal coaxial nanorods with the alumina shell insulator are suitable for use as nano probes or electrodes capable of penetrating the cell membrane, and hence being able to sense the biological functions within the cells.
URI: http://hdl.handle.net/11455/2038
其他識別: U0005-1707200822004900
Appears in Collections:機械工程學系所

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