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標題: CMOS-MEMS微鏡面陣列與可調式微共振器
CMOS-MEMS micro mirror array and tunable micro resonator
作者: 高斌栩
Kao, Pin-Hsu
關鍵字: CMOS process;CMOS製程;resonator;micromirro;micro resonator;MEMS;共振器;微鏡面;微共振器;MEMS
出版社: 機械工程學系所
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本文研究利用0.35 μm 標準半導體CMOS製程技術,設計和製作一組應用於共焦顯微鏡掃描機構之,高頻微鏡面陣列結構,與機械式可調頻微共振器。微鏡面結構與共振器結構皆利用金屬鋁的材質所構成,並以二氧化矽作為犧牲層結構,後製程部分僅需一道無光罩式濕式蝕刻步驟,將二氧化矽犧牲層蝕刻,即可完成結構的懸浮。由於微結構利用標準半導體製程所製作,因此十分具有潛力,可將結構整合電路於單一晶片上,本文利用牛頓運動定律,推導出相關結構的運動方程式,以作為尺寸設計時的依據。微鏡面陣列結構部份,包含了一組圓形的鏡面平台,與排列於鏡面四周互相對稱的懸臂梁,鏡面的下方設計了四組四分之ㄧ圓形的驅動電極,用來驅動並且有效控制圓形鏡面的旋轉方向。微鏡面結構的量測儀器包含了一組微機電動態分析儀系統與共軛焦3-D表面輪廓量測系統,透過這些測量儀器,可以測試微鏡面的性能與鏡面陣列之表面輪廓。實驗結果顯示,當驅動電壓為40 V時,此微鏡面結構具有最大旋轉角約為2.55°,其自然共振頻率為59.1 kHz,此性能特性已符合共焦顯微鏡掃描機構之應用。共振器部分包含了三個部份:驅動端、調變端與感測端,驅動端通電後,可提供驅動力使共振器振動,感測端外接一組感測電路,當結構開始振動時,施加直流偏壓於調變端,使得共振頻率因而發生改變。實驗結果顯示,當驅動電壓為10 V時,此微共振器的共振頻率約為183 kHz,在調變端施加30 V之直流偏壓後,共振頻率可提升至197 kHz,調變率約為7.6 %,其Q值約為400。

This study used the commercial 0.35 µm CMOS (complementary metal oxide semiconductor) process and a simple maskless post-process to fabricate an array of micromirrors which is applied on the confocal microscopy system and a tunable resonator. They were made of aluminum; the sacrificial layer was silicon dioxide. The post-process involved only one maskless wet etching to remove the sacrificial layer, and to release the micro structure. These micro structure were compatible with the standard CMOS process, they have a potential to combine with integrated circuits on a chip.
The micromirror array contained a circular membrane and four fixed beams set symmetrically around. A MEMS (micro electromechanical system) motion analysis system and a confocal 3D-surface topography analysis system were used to characterize the properties of the micromirror array. Experimental results showed that the micromirror had a tilting angle of about 2.55° when applying a driving voltage of 40 V. The natural frequency of the micromirrors was 59.1 kHz.
In addition to, the resonator included three parts: a driving part to provide a driving force, a sensing part that was used to detect a change in capacitance when the resonator was vibrating, and a tuning part that changed the resonant frequency of the resonator. The main advantages of the tunable resonator were a low driving voltage and compatibility with the CMOS process. Experimental results showed that the resonator had a resonant frequency of about 183 kHz and a driving voltage of 10 V; the resonant frequency reached 197 kHz when a tuning voltage of 30 V was applied. The resonator had a maximum frequency-tuning ratio of 7.6%.
其他識別: U0005-0402201002280600
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