Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/2211
標題: 真空泵浦設備的振動量測程序之探討
Investigation on Vibration Measurement procedure of Vacuum Pump Equipment
作者: 蔡健全
Tsai, Chien-Chuan
關鍵字: Maintenance;定期檢測;standard operational procedure (SOP);vacuum pump;vibration criterion for inspection;diagnosis rules;真空泵浦;檢驗標準;診斷法則;標準作業程序
出版社: 機械工程學系所
引用: 1. 陳興,1995,「振動量測」,機械月刊,第21 卷。第11 期,第184-202頁。 2. 謝華隸,1994,「振動量測技術及其應用」,機械月刊,第20 卷。第12 期,第229-236 頁。 3. 黃崑峰,1993,「預知式維護與振動分析法」,機械月刊,第19 卷。第7 期,第128-141 頁。 4. 王栢村、陳榮亮,2001,「頻譜分析儀之功能與測試」,中華民國振動與噪音工程學會第九屆學術研討會論文集,論文編號:A1-05。 5. 吳永成,1993,「解調變分析在故障診斷上之應用」,機械月刊,第19卷。第7 期,第142-149 頁。 6. 江益璋、柯忠和、黃志昌譯著,JIPM 原作,1999,設備診斷技術實用手冊,中衛發展中心。 7. 許隆昌,2001,設備保養之失效模式與效應分析,碩士論文,中華大學工業工程與管理研究所。 8. 林龍欽,1997,「設備預防保養管理系統」,機械工業雜誌,第177 期,第161-171 頁。 9. 譜威科技公司,2003,PVM 訓練教室教材,振動分析技術。 10. 譜威科技公司,2003,半導體設備振動監控系統技術訓練教材。 11. 吳瑞成,1998,「建立預知保養系統油品分析」,機械月刊,第24 卷。第9 期,第307-310 頁。 12. 中油石化事業部,2001,振動分析與檢測技術、油品分析,預知保養 中國石油股份有限公司。 13. Chun, Y. H., 1992, “Optimal Number of Periodic Preventive Maintenance Operations under Warranty,” Reliability Engineering and System Safety,Vol. 37, pp.223-225. 14. Park, D.H., Jung G. M., and Yum, J. K., 2000, “Cost Minimization for Periodic Maintenance Policy of a System Subject to Slow Degradation,” Reliability Engineering and System Safety, Vol.68, pp.105-112.
摘要: 
本文以半導體廠愛德華(Edwards)真空泵浦設備為例,作執行定期檢測標準作業程序的分析說明,使用振動頻譜分析儀器量測真空設備振動,對所量測真空泵浦設備作診斷分析,從頻譜分析儀器量測、診斷分析過程中,建立振動量測檢驗標準及故障診斷的方式,作為判斷設備好壞的基準。本文目的在於建立設備依製程執行定期檢測保養的標準作業程序流程,以消除半導體業界中潛在缺點,其他類型真空泵浦設備亦可參考此檢測程序來運用,在設備介紹過程中加入半導體各製程造成機械泵浦的內部故障磨損情況於附錄中,其製程分類以化學氣象沉積(CVD)、乾蝕刻(Dry Etch)、擴散(Diffusion)三種為主,並選擇擴散(Diffusion)製程作為案例探討。

This text takes Edwards vacuum pumps as the instance to analyze and illustrate the standard operational procedure for executing the regular examination and maintenance. Using vibration spectrum analyzer measures the vibration of the vacuum pumps in order to diagnose and analyze the examined equipment. Through the progress of the measurement by vibration spectrum analyzer and the result from the diagnosis and analysis, a standard procedure for examining vibration and a method for troubleshooting are established. In addition, using the application of measuring vibration and the standard operational procedure for executing the regular examination and maintenance in the semiconductor factories is also discussed in this text. Each factory can establish its own work flow for regular equipment examination and maintenance during the manufacturing process. They even can further develop or standarize other types of work flow for the equipment examination. Compared with the loss caused by unexpected machinery breakdown, the annual costs that the internal industries spend on servicing and mantaining their rotational mechanical equipment are actually much cheaper. Therefore, in default of proper maintainance or failing to control the use status of equipment, it may end in the machinery damaged even the breakdown and that will really cost the internal industries a lot of money.
URI: http://hdl.handle.net/11455/2211
其他識別: U0005-0608200912243800
Appears in Collections:機械工程學系所

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