Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/2216
標題: 非平衡磁控濺鍍之薄膜光學特性研究
The Optical Characteristics Studies of Thin Films by Unbalanced-Magnetron Sputtering Technology
作者: 蔡政達
Tsai, Cheng-Ta
關鍵字: 非平衡磁控濺鍍;Unbalanced Magnetron Sputtering Technology;非全反射鋁膜;穿透率;non-full reflection aluminum thin film;transmission
出版社: 機械工程學系
摘要: 
純鋁膜是個由唯一由紫外光區到紅光外區,皆具有高反射率的薄膜,因此關於鋁膜研究與應用,大多朝向各種反射鏡、微結構、抗氧化抗腐蝕等方面,幾乎無討論非全反射鋁膜的文章。因此本研究應用非平衡磁控濺鍍機,利用不同製程因子(操作參數)的組合,針對非全反射鋁膜之厚度與穿透率進行探討。並使用反應曲面法來建立穿透率迴歸模型,如此以利後續研究者可以依此模型進行預測值的推斷。最後並探討將此薄膜應用於DVD-9半反射層的可行性。
實驗結果顯示,因子降低沉積速率的影響程度分別為靶材與基板距離大於功率,而功率大於操作壓力。因子提升穿透率(波長為650nm)的影響程度分別為靶材與基板距離小於功率,而功率小於操作壓力。上述因子操作範圍為靶材與基板距離由10cm升至25cm,功率由2030W降至1015W(靶材尺寸5*17吋),操作壓力由2mTorr升至5mTorr。穿透率迴歸模型方面,實驗值與預估值之誤差為4.39%。DVD-9半反射層方面,本研究之非全反射鋁膜尚無法滿足目前所要求之規格。

Aluminum thin film is the only one that has high reflection on ultraviolet to infrared. Therefore, the most of studies and applications in aluminum thin film are focused on reflectors, microstructure and anti-oxidation etc. There are few studies on the non-full reflection aluminum thin film.
In this study, the Unbalanced Magnetron Sputtering Technology was used to deposit single-layer aluminum thin film coating on the B270 glass substrate. The main points are to analyze thickness and transmission (wavelength on 650nm) on the non-full reflection aluminum thin film by the different factors (operation parameters). Then, the Response Surface Method is used to build transmission regression model. Furthermore, this study has discussed its feasibility which is application to the DVD-9 semi-reflector layer in the end.
Experimental results indicate that the influence degree of the factors reduced deposition rate that it was target-substrate distance greater than power, power greater than working pressure. The influence degree of the factors raised transmission that it was target-substrate distance smaller than power, power smaller than working pressure. The above-mentioned factors of operation range was target-substrate distance from 10cm raised to 25cm, Power from 2030W reduced to 1015W (target is 5*17inch), working pressure from 2mTorr raised to 5mTorr.
The transmission regression model had a little error on 4.39% approximately between observed values and forecasted values. The non-full reflection aluminum thin films still don't to satisfy specifications of the DVD-9 semi-reflector layer at present.
URI: http://hdl.handle.net/11455/2216
Appears in Collections:機械工程學系所

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