Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/2219
標題: 結合調控式平行相位展開法應用於白光干涉儀量測表面形貌
Application in white light interferometry measurement surface by combination of parallel phase unwrapping algorithm
作者: 黃澤為
Huang, Tse-Wei
關鍵字: 白光干涉術;White-light interference;零階干涉條紋鑑定法;相移法;調控式平行相位展開法;Zero-order interference fringe identification;Phase shifting method;Parallel phase unwrapping algorithm
出版社: 機械工程學系所
引用: [1]Yeou-Yen Cheng, James C.Wyant, “Multiple wavelength phase shifting interferometry”, Applied Optics, Vol.24 Issue 6, pp.804, 1985. [2]Patrick Sandoz, Gilbert Tribillon, “Profilometry by zero-order interference fringe identification” ,Modern Optics, Vol.40, No.9, pp.1691-1700,1993. [3]Patrick Sandoz, “An algorithm for profilometry by white-light phase-shifting interferometry” ,Modern Optics, Vol.43, No.8, pp.1545-1554,1996. [4]Patrick Sandoz, “Unambiguous profilometry by fringe-order identification in white-light phase-shifting interferometry” ,Modern Optics, Vol.44,No.3, pp.519-534,1997. [5]Robert Windecker ,Matthias Fleischer, “Testing mirco devices with fringe projection and white-light interferometry” ,Optics and Lasers in Engineering, Vol.36,Issue 2, pp.141,2000. [6]Mingzhou Li, Chenggen Quan, Cho Jui Tay, Ivan Reading, Shihua Wang, “Measurement of transparent coating thickness by the use of white light interferometry” ,Proc.of SPIE, Vol.5852, Singapore,2004. [7]W.W.Macy, “Two-dimensional fringe-pattern analysis”, Applied Optical, Vol.22, pp.3898-3901, 1983. [8]R. M. Goldstein, H. A. Zebker and C. L. Werner, “Satellite radar interferometry : Two-dimensional phase unwrapping”, Radio Science, Vol.23(4), pp.713, 1988. [9]A Spik and D.W Robinson, “Investigation of the cellular automata method for phase unwrapping and its implementation on an array processor” ,Optics and Lasers in Engineering, Vol.14, pp.25-37,1991. [10]H.Y.Chang, C.W.Chen, C.K.Lee and C.P.Hu, “The tapestry cellular automata phase unwrapping algorithm for interferogram analysis” ,Optics and Lasers in Engineering, Vol.30, pp.487-502,1998. [11]陳森案, “相位重建之影像處理技術應用於光學量測之研究”, 國立中興大學機械工程學研究所碩士論文, 中華民國九十一年七月。 [12]M.J.Huang and Cian-Jhih Lai, “Phase unwrapping based on a parallel noise-immune algorithm” ,Optics and Lasers Technology (EI,SCI), 34(6), pp.457-464, 2002. [13]Pavel Pavlicˇek and Jan Soubusta, “Theoretical measurement uncertainty of white-light interferometry on rough surface” ,Appl.Opt., Vol.19, No.12, pp.1809-1813, 1992. [14]Matthias Fleischer, Robert Windecker, and Hans J. Tiziani, “Theoretical limits of scanning white light interferometry signal evaluation algorithms” ,Appl.Opt., Vol.40, No.17, pp.2815-2820, 1996. [15]Peter de Groot and Leslie Deck, ” Three-dimensional imaging by sub-Nyquist sampling of white-light interferograms”, Optics and Lasers, Vol.18, No.17, pp.1462-1464, 1993. [16]M.Born, E.Wolf, “Principle of Optics” ,Pergamon, Oxford, 1980. [17]R.Cusack, J.M.Huntley, and H.T.Goldgrein, “Improved noise immune phase unwrapping algorithm”, Applied Optical, Vol.34, pp.781-789, 1995. [18]J.M.Huntley and H. Huntley, “Temporal phase unwrapping algorithm for automated interferometry analysis”, Applied Optical, Vol.32(17), pp.3047-3052, 1993. [19]H.O.Salder and J.M.Huntley, “Temporal phase unwrapping: application to surface profiling of discontinuous object”, Applied Optical, Vol.36(13), pp.2770-2775, 1997 [20]D.C.Ghiglia, G.A.Mastin and L.A.Romero, “Cellular-automata method for phase unwrapping”, J.Opt.Soc. Am. A, Vol.14(10), pp.276-280, (1987). [21]陳彥霖, “調控式平行相位展開法參數自動搜尋並結合區塊接合技術進行形貌不連續相位圖之相位展開研究”, 國立中興大學機械工程系研究所碩士論文, 中華民國九十六年七月。 [22]凌維成, “白光干涉於微型元件表面形貌量測之應用”, 國立中興大學機械工程學系研究所碩士論文, 中華民國九十四年七月。 [23]葉力旗, “應用數位影像相關法於白光干涉形貌量測之縫合”, 國立成功大學機械工程學系研究所碩士論文, 中華民國九十六年七月。
摘要: 
文主要的目的為使用白光干涉技術,利用Mirau物鏡搭配光學顯微鏡來架設白光干涉儀,使用PZT掃描整張圖後找出干涉條紋的零階干涉位置,利用七步相移演算法求得包裹相位圖,接著使用調控式平行相位演算法重建待測物的三維形貌,最後得到的三維形貌結果再與干涉條紋鑑定法作比較。以上驗證得知,使用七步相移演算法可以得到最佳的三維形貌。

The goal of thesis is to use white light interference technology to rebuild the 3D surface profile of the object. Building up the white light interferometry by combining Mirau object lens and optical microscope, scanning the figure by PZT and finding out the position of Zero-order interference of the interference fringe, the wrapped phase map is obtained from seven-step phase shifting algorithm, then apply the parallel phase unwrapping algorithm to rebuild the 3D surface profiled. Finally, the result of 3D surface profiled can be compared with Zero-order interference fringe identification. In conclusion ,using seven-step phase shifting algorithm can get the best 3D surface profiled.
URI: http://hdl.handle.net/11455/2219
其他識別: U0005-1008200916050100
Appears in Collections:機械工程學系所

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