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A Study on The Control of Multi-Axis Precision Positioning Stage
|關鍵字:||multi axes positioning stage;多軸定位平台;flexure structures;Piezo-electric actuator;fuzzy control;撓性鉸鍊;壓電致動器;模糊控制||出版社:||機械工程學系所||引用:||M.J. Chung; Y.H Yee; Y.J. Kim; S.B. Kwak; “Development of high precision X-Y stage using for production and inspection equipment of organic electro luminescence display,” SICE, 2007. Annual Conference, 17-20 Sept. 2007, pp. 1649-1652 Y. Park; H. Kim, “Precision motion control of a three degrees of freedom hybrid stage with dual actuators,” Mechatronics and Automation, 2007. ICMA 2007. International Conference on, 5-8 Aug. 2007, pp. 1458-1465 J.W Jeon; M. Caraiani; D.H. Hwang; J.H. Lee; D.S. Kang; Y.J. Kim; S.S Kim; “High-precision positioning control of magnetic levitation system,” IEEE Industrial Electronics, IECON 2006 – 32nd Annual Conference on, 6-10 Nov. 2006, pp. 5221-5226 C. Fulford; M. Maggiore; J. Apkarian; “Control of a 5DOF magnetically levitated positioning stage,” American Control Conference, 2008, 11-13 June 2008, pp 2840-2845 S.S Ku; U. Pinsopon; S. Cetinkunt; S. Nakajima; “Design, fabrication, and real-time neural network control of a three-degrees-of-freedom nanopositioner,” Mechatronics, IEEE/ASME Transactions on, Vol. 5, Sept. 2000, pp. 273-280 R. Merry; N.D. Kleijn; R.V.D. Molengraft; M. Steinbuch; “Using a walking piezo actuator to drive and control a high-precision stage,” Mechatronics, IEEE/ASME Transactions on, Vol. 14, Feb. 2009, pp. 21-31 T.F. Lu; D.C. Handly; Y.K. Yong; “loop closure theory in deriving a linear and simple kinematic model for a 3 dof parallel micro-motion system,” Proceedings of SPIE – The International Society of Optical Engineering, Vol. 5276, 2004, pp. 57-66 H. Hashimoto; N. Hino; Y. Ohyama; M. Niitsuma; C. Ishii; “Positioning control of the finger tip drive type of linear stage using disturbance observer,” Industrial Electronics Society, 2004. IECON 2004. 30th Annual Conference of IEEE, Vol. 3, 2-6 Nov. 2004, pp. 2098-2103 J. Lin; H. Chiang; C.C. Lin; “Tunnung PID control gains for micro piezo-stage in using grey relational analysis,” Machine Learning and Cybernetics, 2008 International Conference on, Vol. 7, 12-15 July 2008, pp. 3863-3868 J.W.F. Cheung; Y.S. Hung; “Robust learning control of a high precision planar parallel manipulator,” Mechatronics, Vol. 19, Feb. 2009, pp. 42-55 A. Sabanovic; K. Abidi; M. Elitas; “A study on high accuracy discrete-time sliding mode control,” Power Electronics and Motion Control Conference, 2006. EPE-PEMC 2006. 12th International, Aug. 2006, pp. 355-360 H.T. Yau; J.J Yan; “Adaptive sliding mode control of a high-precision ball-screw-driven stage,” Nonlinear Analysis: Real World Applications, Vol. 10, June 2009, pp. 1480-1489 J. Ma; D. Cong; Q. Huang; J. Han; “Accurate tracking control strategy of harmonic motion of 6-DOF motion simulator,” Integration Technology, 2007. ICIT ’07. IEEE International Conference on, 20-24 March 2007, pp. 534-537 A. Rubaai; A. Ofoli; M. Castro; “dSPACE DSP-based rapid prototyping of fuzzy PID controls for high performance brushless servo drives,” Industry Applications Conference, 2006. 41st IAS Annual Meeting. Conference Record of the 2006 IEEE, Vol. 3, 8-12 Oct. 2006, pp. 1360-1364 S.J. Huang; S.S. Wang; “Mechatronics and control of a long-range nanometer positioning servomechanism,” Mechatronics, Vol. 19, Feb. 2009, pp. 14-28 張善岳，「六軸微定位平台之設計與分析」，中興大學機械所碩士論文，中華民國九十七年七月。 Physik Instrumente, “Designing with piezoelectrics: nanopositioning fundamentals,” September 2005 Piezomechanik, “Piezo-mechanics: an introduction,” September 2003 Physik Instrumente, Micropositioning, Nanopositioning Nano-automation, 2001 J.M. Paros; L. Weisbord; “How to design flexure hinge,” Machine Design, Vol. 37, Nov. 1965 B.H. Kang; T.Y. Wen; N.G. Dagalakis; J.J. Gorman, “Analysis and design of parallel mechanism with flexure joints,” Proceedongs of the IEEE Transctions on Robotics, Vol. 21, No. 6, December 2005, pp. 1179-1185 Physik Instrumente, “PZ 106E user manual,” November 2003  Physik Instrumente, “PZ 77E user manual,” April 2007 Iotech, DaqBoard/2000 and /2000c series user’s manual, April 2002 T.F. Lu; D.C. Handly; Y.K. Yong; “Position control of a 3 DOF Compliant micro-motion stage,” Control, Automation, Robotics and Vision Conference, 2004. ICARVA 2004 8th, Vol. 2, 6-9 Dec. 2004, pp. 1274-1278||摘要:||
本研究針對一個多軸定位平台之XYθ三自由度，設計適合的控制器以提升其定位精度。平台之尺寸為140mm 140mm 10mm，其結構是由多組割痕式撓性鉸鍊組合而成，致動器則是採用壓電致動器。建立平台之數學模型是使用Largrange’s equation推導而出，其數學模型之功用為定位模擬，了解控制器的能力。
定位平台之模擬結果，其X軸、Y軸與θ軸之安定時間能控制在0.02 sec以內。在平台之座標定位實驗中， XYθ三軸之誤差最大不超過0.1 和2 。
The objective of this research is to design a suitable controller for a multi axes positioning stage. The dimension of this positioning stage is 140mm 140mm 10mm, and with XYθ three degree of freedoms. Piezo-electric actuators are used to drive the stage. Largrange's equation is used to derive the mathematic model of this stage.
For the controller, a fuzzy control strategy is used to overcome the coupling effect of the stage. The XYθ displacement errors and differential of these errors are selected as the input of the controller. While, the displacement compensations on XYθ axes are used as the output. In order to simplify the rule base and program, the input and output variables are divided into X, Y, θ three subgroups. The controller is then composed by three subsystems according these three subgroups.
From the simulation results, the settling time on X-axis, Y-axis andθ-axis is controlled within 0.02 second. While, from the experiment result, the error on X-axis, Y-axis andθ-axis is less than 0.1 and 2 respectively.
|Appears in Collections:||機械工程學系所|
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