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標題: 化學機械研磨之類神經網路式Run-to-Run製程控制
Neural Network Based Run-to-Run CMP Process Control
作者: 游政雄
關鍵字: CMP;化學機械研磨;Run-to-Run process control;neural network;Run-to-Run製程控制;類神經網路
出版社: 機械工程學系

The goal of this thesis is to propose an intelligent process control strategy that combines the RBF based neural fuzzy network and the run-to-run process control techniques for the erratic and unstable CMP processes.
In this new run-to-run control scheme, two RBF based neural fuzzy networks are employed to replace the 1st order linear process predicting model and the linear controller of the conventional EWMA scheme, respectively. The learning and nonlinear mapping essences of the neural network provide this new control structure with more power in nonlinear process modeling and control.
Computer simulations and experimental results demonstrate that the proposed new control scheme can suppress the drifting problem better than the conventional EWMA model. In addition, no extra sensor and machine modification is required to employ the new control method. Consequently, it is highly feasible for industrial implementation.
Appears in Collections:機械工程學系所

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