Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/2378
標題: 應用光學讀取頭裝置量測微流道深度
Measurement of microchannel depth using optical pickup head devices
作者: 王凱弘
Wang, Kai-Hung
關鍵字: pickup head;光學讀取頭;focus error signal;聚焦誤差訊號;深度量測
出版社: 機械工程學系所
引用: [1] http://www.zimmerman.com.tw/news/siddata/taylor-4.pdf, 中美科學全球資訊網。 [2] Fan K.C., Chu C.L., Mou J.I., “Development of a low-cost autofocusing probe for profile measurement,” Measurement Science and Technology, 2001, pp. 2137-2146. [3] Kostner S., Vellekoop M. J., “Detection of single biological cells using a DVD pickup head,” TRANSDUCERS and EUROSENSORS ''07-14th International Conference on Solid-State Sensors, Actuators and Microsystems, 2007, pp. 2123-2126. [4] Kostner S., Vellekoop M. J., “DVD Pickup Heads for Optical Measurement Applications,” Elektrotechnik and Informationstechnik, 2008, pp. 98-101. [5] Kim K.H., Lee S.Y., Kim S., Jeong S.G., “DNA microarray scanner with a DVD pick-up head,” Current Applied Physics, 2008, pp. 687-691. [6] Liu C.H., Li Z.H., “Application of the astigmatic method to the thickness measurement of glass substrates,” Applied Optics, 2008, pp. 3968-3972. [7] Hnilicka B., Voda A., Schroder H.J., Filardi G., “Modelling the focus error characteristic of a DVD player,” IEEE Conference on Control Applications -Proceedings, 2002, pp. 629-630. [8] 許德偉, 光學頭聚焦誤差對雷射反饋雜訊的影響之研究, 國立中興大學機械系工程研究所碩士論文, 2005。 [9] 廖展漣, 應用DVD探頭及陰影檢測法於精密面上位移量測系統之研製, 國立台灣大學機械工程研究所碩士論文, 2002。 [10] 劉昆育, 運用光學頭於旋轉微流道碟片與數位訊號分析, 國立中興大學機械系工程研究所碩士論文, 2008。 [11] 邱紹鈞, 應用DVD 讀取頭於即時影像聚焦之技術, 國立中山大學機械與機電工程學系碩士論文, 2007。 [12] 蔡松雨, “藍光光碟的發展,” 工業材料雜誌第188期, 2002。 [13] Hecht E., OPTICS, 4th edition, Addison Wesley, San Francisco, 2002.
摘要: 
量測微流道的儀器可分為接觸式與非接觸式,使用奈米探針進行接觸式量測,容易刮傷微流道表面;光學非接觸式的3D共軛焦表面形狀量測系統,則需要可反光平面作定位量測。這兩種量測系統均不易量測封裝後之微流道。本研究目的是發展DVD光學讀取頭於微流道幾何形狀量測系統之應用。
本實驗使用光學讀取頭之聚焦機制進行微流道深度量測,藉由聚焦誤差訊號判定封裝層與反射層之位置。根據實驗數據整理出聚焦光點移動速度與折射率關係,利用此一數據修正折射率對讀取頭聚焦光點移動速度之影響。我們量測兩種不同材質微流道晶片,一種是以光阻製作微流道於矽晶片表面,封裝層為500µm之玻璃片;另一種使用CNC加工微流道於聚碳酸酯(PC)透明片做為封裝層,而濺鍍鋁為反射層。本光學讀取頭量測系統與三維表面粗度量測儀所量測之微流道深度比較相差約1%。

This study shows that application of DVD pickup heads can measure the depth of microchannels. First, we explain the laser system of the DVD pickup head. Then, we introduce the pickup heads system for measuring the depth of microchannels. The microchannels are covered by a glass slice and the depth of microchannels cannot be measured with a conventional contact probe stylus.
According to focus error signal (FES) of pickup heads system, we can judge where the reflective surface is. Two types of microfluidic chips composed of different materials were used for measurements of the depth of channel. Comparison of the results from pickup heads to the result from the three dimensional surface roughness measuring instrument shows that the difference are within 1%.
URI: http://hdl.handle.net/11455/2378
其他識別: U0005-2807200917475000
Appears in Collections:機械工程學系所

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