Please use this identifier to cite or link to this item:
Interferometric Testing of Spherical Surface
|關鍵字:||Interferometry;干涉;Phase-Shifting;Phase-Unwrapping;Spherica measurement;相位移;相位展開;球面量測||出版社:||機械工程學系所||引用:||Cho Jui Tay, Madhuri Thakur, and Chenggen Quan, "Grating projection system for surface contour measurement," Appl. Opt. Vol. 44, No. 8, pp. 1393-1400(2005). M. J. Tsai, C. C. Hung, "Development of a high-precision sur-face metrology system using structured light projection," Measurement Vol. 38 pp. 236-247 (2005). J. DYSON, Sc.D., F.Inst.P., F.R.S, "Interferometry as a meas-urement tool,"(1984). G. Schulz, J. Schwidert, "Precision measurement of plane-ness," Appl. Opt. Vol. 6, No. 6, pp. 1077-1084(1967). J. Schwider, O. Falkenstorfer, "Twyman-Green interferometer for testing microspheres," Opt. Eng. Vol. 34, No. 10, pp. 2972-2975(1995). X.F. Qiang, W. Gao, and S. Kiyono, "Accurate profile meas-urement of spherical surface using an interferometer," JSME International Journal Series C Vol. 44, No. 3, pp. 650-655(2001). Paul E. Murphy, Thomas G. Brown, and Duncan T. Moore "Interference imaging for aspheric surface testing" Appl. Opt. Vol. 39, No. 13, pp.2122-2129(2000).  James C. Wyant, "Phase-shifting interferometry," (1998). K. Creath, "Temporal Phase Measurement Methods," in Inter-ferogram Analysis-Digital Fringe Pattern Measurement Tech-niques, D. W. Robinsio, and G. T. Reid, eds. pp. 94-113 (1993). Qian Kemao, Shu Fangjun, Wu Xiaoping, " Determination of the best phase step of the Carre algorithm in phase shifting interferometry," Meas. Sci. Technol. Vol. 11, pp. 1220-1223 (2000) W. W. Macy, "Two-dimensional fringe-pattern analysis," Appl. Opt. Vol. 22, No. 23, pp. 3898-3901 (1983). D. C. Ghiglia, G. A. Mastin, and L. A. Romero, "Cellu-lar-automata method for phase unwrapping," J. Opt. Soc. Am. A, Vol. 4, No. 1. pp. 267-280 (1987). M. A. Herraez, D. R. Burton, M. J. Lalor, and M. A. Gdeisat, " Fast two-dimensional phase-unwrapping algorithm based on sorting by reliability following a noncontinuous path," Appl. Opt. Vol. 41, No. 35, pp. 7437-7444 (2002). C. Quan, S. H. Wang, C. J. Tay, "Nanoscale surface deforma-tion inspection using FFT and phase-shifting combined inter-ferometry," Prec. Eng. Vol. 30, pp. 23-31(2006). M. Born, E. Wolf, "Principle of Optics," Pergamon Press, pp. 464, (1964). K. Creath, "Temporal Phase Measurement Methods," in Inter-ferogram Analysis-Digital Fringe Pattern Measurement Tech-niques, D. W. Robinsio, and G. T. Reid, eds. pp. 97-99 (1993). P. Hariharan, "The study of optical wavefronts," in optical in-terferometry, pp. 131-150(1985). Katherine Creath, P. Hariharan, "Phase-shifting errors in in-terferometric tests with high-numerical-aperture reference surfaces," Appl. Opt. Vol. 33, No. 1, pp. 24-25 (1994). Jiri Novak, "Five-step phase-shifting algorithms with unknown values of phase shift," Optik Vol. 114, pp. 63-68 (2003). D. Malacara, M. Servin, Z. Malacara, "Schwider-Hariharan five-step(4+1) Algorithm," in Interferogram Analysis for Op-tical Testing, pp.196-199(1998). D. W. Robinson, "Phase Unwrapping Methods," in Interfero-gram Analysis-Digital Fringe Pattern Measurement Tech-niques, D. W. Robinsio, and G. T. Reid, eds. pp. 215-227 (1993). D. W. Robinson, "Phase Unwrapping Methods," in Interfero-gram Analysis-Digital Fringe Pattern Measuremen Techniques, D. W. Robinsio, and G. T. Reid, eds. pp. 202-215 (1993). Abhijit Patil, Pramod Rastogi, "Nonlinear regression technique applied to generalized phase-shifting interferometry," Journal of Modern Opt. Vol. 52, No. 4, pp.573-582(2005).||摘要:||
In this paper, a Mirau interferometer and phase-shifting interferometry are used for measuring a spherical surface. Parallel ray will be focused on the center of a sphere when it passes through a Mirau objective, then the beam which is reflected from spherical surface can be seem to come from the center of the spherical surface. This objective beam will interfere with reference beam which is reflected from reference surface in Mirau objective. If the lens that with high numerical aperature is selected, the measurement range will be increased. Compare with traditional touch probe measurement method, the interference method has large measurement range and short measurement time.
Almost all existing phase-shifting algorithms are based on the assumption that phase-shifting at all pixel of the intensity frame is equal and known. However, it may be very diffcult to achieve this case in practive. Moreover, when measuring a spherical surface, the phase-shifting along optical axis and off-axis will be related with cosine function. Hence, the phase-shifting on the test surface will display nonuniform distribution. This nonuniform phase-shifting distribution can be used by five-step phase-shifting algorithms with unknown values of phase-shifting which is similarly to Carre technique to complete phase shifting and phase calculation on the spherical surface.
Due to the test surface is a spherical surface, therefore when phase-shifting is calculated, these values can be used as curve fitting method for fitting all values that conform to real phase-shifting on spherical surface. According to these phase-shifting values, which are fitted, and geometric relation, we can calculate measurement position of all points on spherical surface.
|Appears in Collections:||機械工程學系所|
Show full item record
TAIR Related Article
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.