Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/2513
DC FieldValueLanguage
dc.contributor莊凱評zh_TW
dc.contributor戴慶良zh_TW
dc.contributor田春林zh_TW
dc.contributor.advisor施錫富zh_TW
dc.contributor.author許雅雯zh_TW
dc.contributor.authorSyu, Ya-Wunen_US
dc.contributor.other中興大學zh_TW
dc.date2011zh_TW
dc.date.accessioned2014-06-05T11:43:28Z-
dc.date.available2014-06-05T11:43:28Z-
dc.identifierU0005-2308201015095200zh_TW
dc.identifier.citation[1] 工研院量測中心委託之研究計畫﹐結案報告﹐2009 [2] 金國藩 等著﹐’ 二元光學’﹐國防工業出版社﹐1998 [3] J. F. Scholl, E. L. Dereniak, M. R. Descour, C. P. Tebow, and C. E. Volin, ‘Phase grating design for a dual-band snapshot imaging spectrometer’, Appl. Opt., Vol. 42, No. 1, p.18~29, 2003. [4] W. R. Johnson, D. W. Wilson, and G. Bearman, and J. Backlund, ‘An all-reflective computed tomography imaging spectrometer’ , Proc. SPIE, Vol. 5660, p.88~97, 2004. [5] 鄭玉權, ‘小型Offner光譜成像系統的設計’ , 光學精密工程,第13卷,第6期, 2005. [6] R. W. Aumiller, N. A. Hagen, E. L. Dereniak, R. Sampson, and R. W. McMillan, ‘Design of an LWIR Snapshot Imaging Spectropolarimeter ’, Proc. SPIE, Vol. 6295, p.62950E(1-9), 2006. [7] W. R. Johnson, D. W. Wilson, and W. Fink, ‘Snapshot hyperspectral imaging in ophthalmology’, J. Biomed. Opt., Vol.12, No. 1, p.014036(1-7), 2007. [8]徐敘瑢、蘇勉曾, ‘發光學與發光材料’, 化學工業出版社, 2004 [9]趙凱華, 鍾錫華, ‘光學’, 儒林圖書公司, 1992 [10]呂俊鑫, ‘利用稜鏡型全像光學元件之微型讀寫頭設計’, 國立中興大學機械系碩士論文, 民國九十八年 [11]蔡易倫, ‘應用全像光學元件之同軸全像儲存系統的研究’, 國立中興大學機械系碩士論文, 民國九十八年 [12] 莊達人, ‘VLSI製造技術’ , 高立出版社, 民國92年 [13] C. Vandervlugta, H. Mastersonb, N. Hagena, and E. L. Dereniaka, ‘Reconfigurable liquid crystal dispersing element for a Computed Tomography Imaging Spectrometer’ ,Proc. SPIE, Vol. 6565, p.65650O(1-9), 2007. [14] M. Descour and E. Dereniak, ‘Computed-tomography imaging spectrometer: experimental calibration and reconstruction results’, Appl. Opt., Vol. 34, No. 22, p.4817~4826, 1995. [15] C. E. Volin, B. K. Ford, M. R. Descour, J. P. Garcia, D. W. Wilson, P. D. Maker, and G. H. Bearman, ‘High-speed spectral imager for imaging transient fluorescence phenomena’, Appl. Opt., Vol. 37, No. 34, p.8112~8119, 1998. [16] C. E. Volin, J. P. Garcia, E. L. Dereniak, M. R. Descour, T. Hamilton, and R. McMillan, ‘Midwave-infrared snapshot imaging spectrometer’, Appl. Opt., Vol. 40, No. 25, p.4501~4506, 2001. [17] W. R. Johnson, D. W. Wilson, and G. Bearman, ‘Spatial–spectral modulating snapshot hyperspectral imager’, Appl. Opt., Vol. 45, No. 9, p.1898~1908, 2006. [18] R. W. Aumiller, E. L. Dereniak, R. Sampson, and R. W. McMillan, ‘Longwave Infrared Snapshot Imaging Spectropolarimeter’, Proc. SPIE, Vol. 6660, p.666009(1-8), 2007. [19] J. P. Garcia, C. E. Volin, D. S. Sabatke, M. R. Descour, and E. L. Dereniak, ‘MWIR Computed Tomography Imaging Spectrometer Experimental’, Proc. SPIE, Vol. 4028, p79~87, 2000. [20] N. Hagen, and E. L. Dereniak, ‘New grating for a CTIS imaging spectrometer ’, Proc. SPIE, Vol. 6565, p.65650N(1-9) 2007. [21]楊祚魁, ‘相位式繞射光學元件之研製’, 國立台灣師範大學光電科技研究所碩士論文, 民國九十三年 [22]謝發芸, ‘二次繞射之傾斜視里梭光柵光譜儀研究’, 國立清華大學光電研究所碩士論文,民國九十五年zh_TW
dc.identifier.urihttp://hdl.handle.net/11455/2513-
dc.description.abstract電腦斷層影像光譜儀(computed tomographic imaging spectrometer﹐CTIS)是一種非掃描式儀器,可以從一個場景中的一張快照中獲得充分的空間與光譜的訊息。只需要幾秒鐘就能顯示出光譜圖,能夠對光波的能量、波長、頻寬等重要特徵進行精確分析,在恆星分類、生物醫學、軍事監測等方面有廣泛的應用。 在本研究中,進行電腦斷層影像光譜儀之二維繞射光學元件(diffractive optical element, DOE)的設計與製作。我們提出對光譜成像系統設計出將影像經由繞射方式產生二維色散所必須之色散片(disperser),探討二維之繞射光學元件適用於CTIS系統。以二元光學(binary)技術為基礎,開發可對影像產生二維繞射與色散之相位光柵,目的為使二維之各繞射階產生均勻繞射。利用純量繞射理論分析其二維四階金字塔型光柵之繞射效率,並利用光學設計軟體與數值分析軟體進行分析結構深度與繞射效率之關係,實作部份我們利用微影蝕刻製程將二維繞射光學元件完成,接著驗證其光學繞射效率與設計所需求相符合,最後結合影像光譜儀之光學系統以做驗證在聚焦平面陣列(focal plane array, FPA)上產生二維之繞射影像。zh_TW
dc.description.abstractComputed tomographic imaging spectrometer (CTIS) is a non-scanning instrument which can acquire the spatial and spectral information from the snapshot of a scene. It can display the spectrum in a few seconds and precisely analyze the energy of the light waves, wavelength, bandwith, and other important characteristics. Therefore, it can be widely used in stellar classification, biomedicine, military surveillance, etc. This study consists of the design and production of a two-dimensional diffractive optical element (DOE) for the use of the CTIS. We propose the necessary disperser used for the spectral imaging system through the diffraction of a two-dimensional DOE. And, we discuss the application of the two-dimensional DOE for the CTIS. Based on the technology of binary optics, this study seeks to develop a phase grating which is capable of providing two-dimensional diffraction and dispersion for an image. The purpose is to produce uniform diffraction among the diffraction orders. Scalar diffraction theory is used to analyze the diffraction efficiencies of the two-dimensional four-level pyramid grating. Besides, the optical simulation software and numerical analysis software are employed to analyze the relation between the depth of structure and the diffraction efficiency. In fabrication, we use the lithography and etch processes to implement the DOE and to verify its optical diffraction efficiencies for being consistent with the design values. The final step is the test of the two-dimensional diffraction image produced on the focal plane array (FPA) by means of the optical system of the CTIS.en_US
dc.description.tableofcontents摘要.......................................................I Abstract..................................................II 誌謝.....................................................III 目錄......................................................IV 圖目錄....................................................VI 表目錄....................................................IX 第一章 緒論................................................1 1.1研究背景................................................1 1.2文獻探討................................................2 1.3研究動機與目的..........................................6 1.4論文架構................................................7 第二章 基本理論............................................8 2.1光柵繞射理論............................................8 2.1.1繞射理論簡介..........................................8 2.1.2光柵之特性............................................9 2.1.3光柵形態分類.........................................10 2.1.4相位型光柵繞射效率...................................12 2.2光譜原理...............................................19 第三章 設計與模擬.........................................24 3.1系統簡介...............................................24 3.2光學系統設計...........................................25 3.2.1光譜解析度之分析.....................................25 3.2.2光譜成像系統設計.....................................27 3.3繞射元件設計...........................................30 第四章 元件製作...........................................35 4.1繞射元件製作...........................................35 4.1.1黃光微影技術.........................................35 4.1.2離子蝕刻技術.........................................38 4.2對準鍵的設計...........................................43 第五章 繞射效率量測.......................................47 5.1第一道製作之繞射光學元件量測...........................47 5.2第二道製作之繞射光學元件量測...........................50 5.3二維繞射光學元件量測...................................52 第六章 結論...............................................57 6-1結論...................................................57 6-2未來展望...............................................58 參考文獻..................................................59zh_TW
dc.language.isoen_USzh_TW
dc.publisher機械工程學系所zh_TW
dc.relation.urihttp://www.airitilibrary.com/Publication/alDetailedMesh1?DocID=U0005-2308201015095200en_US
dc.subjectcomputed tomographic imaging spectrometeren_US
dc.subject電腦斷層影像光譜儀zh_TW
dc.subjectphase gratingen_US
dc.subjectdiffractive optical elementen_US
dc.subjectdisperseren_US
dc.subject相位光柵zh_TW
dc.subject繞射光學元件zh_TW
dc.subject色散片zh_TW
dc.title應用於電腦斷層影像光譜儀之二維繞射光學元件之研究zh_TW
dc.titleStudy of two-dimensional diffractive optical element for the computed tomographic imaging spectrometeren_US
dc.typeThesis and Dissertationzh_TW
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.openairetypeThesis and Dissertation-
item.cerifentitytypePublications-
item.fulltextno fulltext-
item.languageiso639-1en_US-
item.grantfulltextnone-
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