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標題: 調控型相位還原及顯微光學量測之研究
作者: 林智文
關鍵字: 相位還原;phase unwrapping;電子斑點干涉術;ESPI
出版社: 機械工程學系

We use EPSI to measure samples with different dimensions and the deformation of microstructure, which is manufactured by semiconductor fabrication or Micro Electronic Mechanical system (MEMS) technique, as it combine with microscope. From the results, we can see that this technique is possible to put accurate measurement into practice. In addition, we propose new ideas about phase unwrap and integrate it with innovative phase unwrapping algorithm (reference[6]). The performance becomes better if using the new ideas from the results of testing.
Appears in Collections:機械工程學系所

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