Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/2611
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dc.contributor.advisor黃敏睿zh_TW
dc.contributor.author林智文zh_TW
dc.date2004zh_TW
dc.date.accessioned2014-06-05T11:43:38Z-
dc.date.available2014-06-05T11:43:38Z-
dc.identifier.urihttp://hdl.handle.net/11455/2611-
dc.description.abstract本論文以電子斑點干涉術結合顯微技術對尺寸等級不同的待測物進行測量,並結合顯微鏡針對半導體製程所生產出來的微結構量測其變形,而由量化的結果證明顯微電子斑點干涉確實可行且有可能得到一精密的量測結果,另外在此論文中對於相位重建提出創新的想法並融入原有的平行性相位展開法,而由結果可證明加入這個想法後確實可使其更加強健。zh_TW
dc.description.abstractWe use EPSI to measure samples with different dimensions and the deformation of microstructure, which is manufactured by semiconductor fabrication or Micro Electronic Mechanical system (MEMS) technique, as it combine with microscope. From the results, we can see that this technique is possible to put accurate measurement into practice. In addition, we propose new ideas about phase unwrap and integrate it with innovative phase unwrapping algorithm (reference[6]). The performance becomes better if using the new ideas from the results of testing.en_US
dc.description.tableofcontents第一章 緒論 1-1 研究動機與方法 ………………………………………………2 1-2 論文大綱 ………………………………………………………3 第二章 電子斑點干涉術 2-1 斑點成因…………………………………………………………4 2-2 基本原理…………………………………………………………6 2-2-1 面內位移量測…………………………………………………9 2-2-2 面外位移量測…………………………………………………13 2-3 相移技術……………………………………………………….15 第三章 調控型相位展開 3-1 平行性相位還原之介紹………………………………………25 3-2 調整控制的概念………………………………………………28 第四章 顯微電子斑點干涉術 4-1 文獻回顧…………………………………………………………39 4-2 斑點大小對干涉結果影響………………………………………40 4-3 結合顯微技術之研究……………………………………………46 4-3-1 實驗架設.……………………………………………………46 4-3-2 實驗結果與計算….…………………………………………49 4-3-3 結果討論.……………………………………………………59 第五章 結論…………………………………………………………63zh_TW
dc.language.isozh_TWzh_TW
dc.publisher機械工程學系zh_TW
dc.subject相位還原zh_TW
dc.subjectphase unwrappingen_US
dc.subject電子斑點干涉術zh_TW
dc.subjectESPIen_US
dc.title調控型相位還原及顯微光學量測之研究zh_TW
dc.typeThesis and Dissertationzh_TW
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.openairetypeThesis and Dissertation-
item.cerifentitytypePublications-
item.fulltextno fulltext-
item.languageiso639-1zh_TW-
item.grantfulltextnone-
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