Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/2622
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dc.contributor.advisor陳昭亮zh_TW
dc.contributor.advisorJau-Liang Chenen_US
dc.contributor.author楊家昇zh_TW
dc.contributor.authorYang, Jia-Shengen_US
dc.date2004zh_TW
dc.date.accessioned2014-06-05T11:43:39Z-
dc.date.available2014-06-05T11:43:39Z-
dc.identifier.urihttp://hdl.handle.net/11455/2622-
dc.description.abstract在今天精密機械的發展下,所要求的精度伴隨技術發展的成熟逐年的提高,而定位技術更是在精密機械中扮演一個不可或缺的角色,本研究著重設計一組具有長行程(100mm以上)、高解析度( 10nm)、最大速度達25mm/s,並具有一定程度的負載能力(1kg)之單軸精密進給平台,並透過工程設計方法的使用解決所面對的工程問題及概念設計,其中主要利用堆疊式壓電致動器驅動及撓性結構的設計完成驅動機構所需要之路徑,並透過連續單步進給的方式完成所需之動作,以摩擦驅動的方式來達成長行程精密定位的目標。在系統控制部分,則是選用DSP做為主要控制器。於實驗部分,以DSP透過電壓放大器直接驅動驅動機構且從工具顯微鏡中觀察到驅動機構之環形運動軌跡。文中,主要完成進給系統之驅動機構設計、製作及基本作動測試。zh_TW
dc.description.abstractAlong with the mutuality of the precision machinery technology, the demands of high accuracy have been increased in recent year. The positioning technology has played an important role. In this research, it is focusing on the design of a single axis precision feeding mechanism, which has a travel range greater than 100 mm, with 10nm resolution, speed greater than 25mm/s, and load capacity of 1kg. An engineering design method was used for problem solving and conceptual design of the precision feeding mechanism. In this research, stacked piezoelectric actuators is used to drive a flexural structure mechanism with a circular movement, which will then push a table by friction force to move along a linear guide. Through continuous stepping feeding, this mechanism can achieve long travel range requirement. A DSP based controller is used in this system for the controlling of the mechanism.en_US
dc.description.tableofcontents摘要………………………………………………………………………....I Abstract………………..…….……………………………………………...II 目錄…………………..……………………………………………………III 圖目錄……………………………………………………………………..VI 表目錄………………………………………………………………..……IX 第一章 緒論 ………………………………………………….….……...1. 1.1 前言 ……………………………………………………….…….1. 1.2 文獻回顧 ………………………………………………….…….2. 1.3 研究目的與內容 ………………………………………….…….3. 第二章 奈米定位平台之概念設計………………………………..….…5. 2.1問題或系統的描述..……………………………………......…….7. 2.1.1創新情境問卷(ISQ)……………………………………....…..7. 2.1.2功能分析(FA)……………….…………………………….…13. 2.2 概念設計……………………………………………………….16. 2.3 概念具體化.……………………………………………………19. 2.3.1 平台機構…………………….………………………….…..19. 2.3.2 硬體架構…………………….……………………….……..22. 2.3.3 控制系統…………………….……………………….……..23. 2.3.3.1 微動模式……………………………………….……...24. 2.3.3.2 超音波驅動模式………….………………….….…….24. 第三章 定位平台之設計與分析………………………………..……25. 3.1 定位平台之作動模擬….…….………………………….……..25. 3.1.1 定位平台分析模型的建立….....…………………………...25. 3.1.2 設計概念模擬………………...…………………………….27. 3.1.3 平台運動特性與輸入頻率之模擬…………………………30. 3.2 驅動機構設計與分析…………………………………...……..31. 3.2.1 平板式撓性結構…….……………………………………...32. 3.2.2 驅動機構構形及分析………………………………….….33. 3.3 驅動機構之ANSYS分析……………………………………..38. 第四章 平台實作與實驗……………………………………………...42. 4.1 設備說明…………………………………………………...…….42. 4.1.1 加速規振頻量測系統………………………………………...42. 4.1.2 TMS320C542 DSP控制器簡介………..…………………..…45. 4.2 驅動機構動態實驗………………………………………..……..48. 4.2.1 動態實驗結果………………………………………………...49. 4.2.2 動態實驗結果比較…………………………………………...51. 4.3. 驅動機構作動測試………………………………………...……51. 4.4. 進給系統驅動測試………………………………………...…....53. 4.5. 實驗結果與討論………………………………………………...57. 第五章、結論及未來展望………………………………………………59. 5.1結論…………………………………………………….…..…….59. 5.2 未來展望………………………………………………..……….60. 參考文獻……………………………………………………………..….61.zh_TW
dc.language.isoen_USzh_TW
dc.publisher機械工程學系zh_TW
dc.subjectfeeding mechanismen_US
dc.subject奈米zh_TW
dc.subjectflexural structureen_US
dc.subjectpiezoelectric actuatoren_US
dc.subjectnanoen_US
dc.subject進給機構zh_TW
dc.subject撓性結構zh_TW
dc.subject壓電致動器zh_TW
dc.title精密進給系統驅動機構之設計研究zh_TW
dc.titleA study on the Design of the Driving Mechanism for a Precision Feeding Systemen_US
dc.typeThesis and Dissertationzh_TW
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.openairetypeThesis and Dissertation-
item.cerifentitytypePublications-
item.fulltextno fulltext-
item.languageiso639-1en_US-
item.grantfulltextnone-
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